Fully Integrated Optical Spectrometer in Visible and Near-IR in CMOS

Hong, Lingyu; Sengupta, Kaushik

doi:10.1109/tbcas.2017.2774603

Cited by 23 publications

(20 citation statements)

References 28 publications

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“…The complete and theory, modal analysis, band structure, full-wave simulation, and experimental result of the nano-plasmonic filter can be found in [64]. Other examples of nano-optical systems in CMOS can be found in [65][66][67][68][69][70].…”

Section: Integrated Angle-insensitive Nano-plasmonic Filter In Cmosmentioning

confidence: 99%

Nano-plasmonics and electronics co-integration in CMOS enabling a pill-sized multiplexed fluorescence microarray system

Hong

Yang

et al. 2018

Biomed. Opt. Express

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The ultra-miniaturization of massively multiplexed fluorescence-based bio-molecular sensing systems for proteins and nucleic acids into a chip-scale form, small enough to fit inside a pill (∼ 0.1cm 3), can revolutionize sensing modalities in-vitro and in-vivo. Prior miniaturization techniques have been limited to focusing on traditional optical components (multiple filter sets, lenses, photo-detectors, etc.) arranged in new packaging systems. Here, we report a method that eliminates all external optics and miniaturizes an entire multiplexed fluorescence system into a 2 × 1 mm 2 chip through co-integration for the first time of massively scalable nano-plasmonic multi-functional optical elements and electronic processing circuitry realized in an industry standard complementary-metal-oxide semiconductor (CMOS) foundry process with absolutely 'no change' in fabrication or processing. The implemented nano-waveguide based filters operating in the visible and near-IR realized with the embedded sub-wavelength multi-layer copper-based electronic interconnects inside the chip show for the first time a sub-wavelength surface plasmon polariton mode inside CMOS. This is the principle behind the angle-insensitive nature of the filtering that operates in the presence of uncollimated and scattering environments, enabling the first optics-free 96-sensor CMOS fluorescence sensing system. The chip demonstrates the surface sensitivity of zeptomoles of quantum dot-based labels, and volume sensitivities of ∼ 100 fM for nucleic acids and ∼ 5 pM for proteins that are comparable to, if not better, than commercial fluorescence readers. The ability to integrate multi-functional nano-optical structures in a commercial CMOS process, along with all the complex electronics, can have a transformative impact and enable a new class of miniaturized and scalable chip-sized optical sensors.

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Section: Integrated Angle-insensitive Nano-plasmonic Filter In Cmosmentioning

confidence: 99%

Nano-plasmonics and electronics co-integration in CMOS enabling a pill-sized multiplexed fluorescence microarray system

Hong

Yang

et al. 2018

Biomed. Opt. Express

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“…In the field of NIR spectroscopy, MEMS- and MOEMS-based NIR spectrometers have made important contributions to the process of instrument miniaturization. The incorporation of MEMS- or MOEMS-based devices into NIR spectrometers has become one of the research hotspots in the field of spectroscopic instruments, and such devices are characterized by cost effectiveness, portability, low power consumption, high speed and small size [ 2 , 3 ].…”

Section: Introductionmentioning

confidence: 99%

Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

et al. 2018

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This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm3, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor.

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“…There has been recent interest in using the metal interconnect in IC processes to make optical structures [43,44]. In this paper, we demonstrate a lens-free fluorescence contact imaging platform using angle-selective gratings (ASGs) for cellular and tissue, in vitro and in vivo, imaging of fluorescently-labeled prostate and breast cancer cells as a model to evaluate the sensitivity and resolution of our system.…”

Section: Introductionmentioning

confidence: 99%

Real-time cancer detection with an integrated lensless fluorescence contact imager

Papageorgiou

Zhang

Giverts

et al. 2018

Biomed. Opt. Express

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Microscopic tumor cell foci left in a patient after surgery significantly increase the chance of cancer recurrence. However, fluorescence microscopes used for intraoperative navigation lack the necessary sensitivity for imaging microscopic disease and are too bulky to maneuver within the resection cavity. We have developed a scalable chip-scale fluorescence contact imager for detecting microscopic cancer in vivo and in real-time. The imager has been characterized under simulated in vivo conditions using ex vivo samples, providing strong evidence that our device can be used in vivo. Angle-selective gratings enhance the resolution of the imager without impacting its physical size. We demonstrate detection of cancer cell clusters containing as few as 25 HCC1569 breast cancer cells and 400 LNCaP prostate cancer cells with integration times of only 50 ms and 70 ms, respectively. A cell cluster recognition algorithm is used to achieve both a sensitivity and specificity of 92 % for HCC1569 cell samples, indicating the reliability of the imager. The signal-to-noise ratio (SNR) degradation with increased separation is only 1.5 dB at 250 µm. Blood scattering and absorption reduce the SNR by less than 2 dB for typical concentrations. Moreover, HER2+ breast cancer tissue taken from a patient is distinguished from normal breast tissue with an integration time of only 75 ms.

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Fully Integrated Optical Spectrometer in Visible and Near-IR in CMOS

Cited by 23 publications

References 28 publications

Nano-plasmonics and electronics co-integration in CMOS enabling a pill-sized multiplexed fluorescence microarray system

Nano-plasmonics and electronics co-integration in CMOS enabling a pill-sized multiplexed fluorescence microarray system

Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

Real-time cancer detection with an integrated lensless fluorescence contact imager

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