Fully Self-Aligned Organic Electroluminescent Devices with Dual Sidewall Structures

Abstract

Fully self-aligned organic electroluminescent devices with dual sidewall structures were studied. The principal point of the fabrication process was the formation of a sidewall structure using reactive ion etching. A cathode metal was used as a mask for self-alignment and an insulating sidewall structure was formed around the device periphery. The device characteristics were measured after sidewall fabrication. Emission was observed above 3.5 V and luminance was measured to be 1000 cd/m2 at a current density of 100 mA/cm2. After the sidewall fabrication process, wet and photolithographic processes were applied. A luminance of over 3000 cd/m2 was also observed after the final fabrication process.