2023
DOI: 10.21203/rs.3.rs-3369484/v1
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Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Young Jae Park,
Man Jae Her,
Youngjae Jeong
et al.

Abstract: The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cCavity consisting of tunable Sagnac loop reflectors (SLR) and a phase shifter based on electrostatic microelectromechanical actuators. The fabrication process of the device is compatible with the standard wafer-level passive silicon photonics platform. The electrical power and energy consumption of the device are ex… Show more

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