Beyond‐CMOS Nanodevices 1 2014
DOI: 10.1002/9781118984772.ch2
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Functionalization of Si‐Based NW FETs for DNA Detection

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“…To address this, silane self-assembled monolayers (SAM) have been shown to generate inorganic/organic heterointerfaces suitable for biomolecule immobilization and LFD performance. [15][16][17][18][19][20] Here, alkoxy groups from organosilane molecules easily form SAMs on surfaces terminated with hydroxyl groups. 21 This can be easily achieved through oxygen (O2) plasma cleaning on semiconductor surfaces such as gold (Au) 22 , silicon (Si) 23 and silicon carbide (SiC).…”
Section: Introductionmentioning
confidence: 99%
“…To address this, silane self-assembled monolayers (SAM) have been shown to generate inorganic/organic heterointerfaces suitable for biomolecule immobilization and LFD performance. [15][16][17][18][19][20] Here, alkoxy groups from organosilane molecules easily form SAMs on surfaces terminated with hydroxyl groups. 21 This can be easily achieved through oxygen (O2) plasma cleaning on semiconductor surfaces such as gold (Au) 22 , silicon (Si) 23 and silicon carbide (SiC).…”
Section: Introductionmentioning
confidence: 99%