Fundamental comparison between non-equilibrium aspects of ICP and MIP discharges

Mullen, J.J.A.M. van der; Jonkers, J Jeroen

doi:10.1016/s0584-8547(99)00042-7

Cited by 72 publications

(56 citation statements)

References 41 publications

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“…Since n e values are for r = 0, we divided the value by 1.64 assuming a Bessel-like profile. For the value of C, we used R * = 3 mm, λ h = 0.0178 W(mK) −1 [26] and S heat = 6.7×10 −19 m 3 s −1 based on the work of references [27][28][29]. It can be seen that the agreement between theory and experiment is reasonable and falls in between the error bars.…”

Section: Discussionmentioning

confidence: 99%

Rayleigh scattering on a microwave surfatron plasma to obtain axial profiles of the atom density and temperature

Hübner

Iordanova

Palomares

et al. 2012

Eur. Phys. J. Appl. Phys.

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Please check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. Abstract. The axial dependency of the central-axis value of the heavy particle density and temperature of surface-wave plasmas is studied using Rayleigh scattering (RyS). The plasma is generated at a frequency of 2.45 GHz in argon by a surfatron operating under the standard settings of a power of 45 W, a flow rate of 50 sccm and a pressure of 20 mbar. To investigate the effect of the pressure on the gas temperature, we also investigated 6 and 10 mbar plasmas. By using a two-dimensional intensified CCD array we could determine and eliminate the influence of false stray light, a major disturbing factor in the determination of the Rayleigh signal. In order to trace the energy fluxes that determine the gas temperature, we performed Thomson scattering so that the properties of the electron gas are known. It is found that the gas temperature, T a, depends on the wall temperature and the product of the gas pressure and the electron pressure. The latter implies that Ta follows the electron density axially, meaning that it is highest at the launcher and decreases monotonically in the wave propagation direction. The maximum gas temperature of around Ta = 800 K is found close to the launcher for the highest gas pressure of 20 mbar. For lower pressures we find lower Ta values. The extrapolation of Ta toward the end of the plasma column leads to a temperature of about 320 K. This study reveals that, for the argon plasmas under study, the central-axis values of the gas temperature are determined by the balance between the heating of the gas by means of elastic electron collisions and the cooling due to heat conduction from the center to the wall.

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Section: Discussionmentioning

confidence: 99%

Rayleigh scattering on a microwave surfatron plasma to obtain axial profiles of the atom density and temperature

Hübner

Iordanova

Palomares

et al. 2012

Eur. Phys. J. Appl. Phys.

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“…This is the opposite to the top boundary where exp(−iβz) is used instead. As the BC should be applied to the total E r field, we substitute the relation E − r = E r − E + r into equation (20), which, using (19), gives…”

Section: Homogeneous Inhomoneous Dirichletmentioning

confidence: 99%

Effect of remote field electromagnetic boundary conditions on microwave-induced plasma torches

Jimenez-Diaz¹,

Dijk²,

Mullen³

2011

J. Phys. D: Appl. Phys.

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Abstract.A flexible versatile electromagnetic model constructed with the PLASIMO platform is employed to explore electromagnetic features of microwave induced plasma torches. The bases, formed by a full-vector formulation of the Maxwell equations, provides the possibility to formulate the boundary conditions in a natural way. Together with the use of a direct matrix solver this gives a convergence speed-up of more than a factor of 100 when compared to a scalar formulation on the azimuthal magnetic field that uses an iterative solver. As a result this electromagnetic model is ready to act in future studies as part of the self-consistent description of plasma-electromagnetic coupling. With the electromagnetic model three types of configuration were studied: the closed, semi-open and open configurations, all three based on the same simplified model-plasmas. It is found that the closed configuration, acting as a cavity for which the (de)tuning is extremely sensitive for the plasma conditions, is less suitable for applications in which changes in plasma compositions can be expected. The semi-open configuration can be seen as a model for the practice often used in laboratories to place Microwave Induced Plasma torches in a grid that aims to protect the environment against microwave electromagnetic radiation. Calculations show that this is good practice provided the radius of this cylindrical grid is in the order of 90 mm. For the most often used configuration, the open version, we found that the power balance as expressed by the coefficients of absorption, transmission and reflection, depends on the electron density of the plasma. The reason is that the plasma acts as an antenna, that converts the electromagnetic waves from the co-axial structure to that of the expansion region and that this antenna function depends on the electron density. The influence of various other antenna elements is investigated as well.

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“…[5] that it works remarkably well for the ICP. However, discrepancies between the dBR-theory and experiments were found for the MIP created by the TIA (Torche injection axiale [6]).…”

Section: Introductionmentioning

confidence: 74%

“…It will be shown that the new detection system reveals more details in the n e -and T e -fields, but also, that despite of the more precise information, the same conflict between the experimental and theoretical results as found for the TIA [5,6] remains. This means that the experimentally found T evalue is substantially larger and the experimental n e -value much smaller than what is found theoretically.…”

Section: Introductionmentioning

confidence: 82%

“…[5], we launched a method to characterize small-sized plasmas using the method of disturbed Bilateral Relations (dBR). This method is based on the fact that plasmas can be regarded as a combination of many different bilateral relations (BR) realized by forward and corresponding backward processes, and that these BRs will be disturbed by the efflux of photons and charged particles.…”

Section: Introductionmentioning

confidence: 99%

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High-resolution electron density and temperature maps of a microwave plasma torch measured with a 2-D Thomson scattering system

Mullen

Boidin

Sandea

2004

Spectrochimica Acta Part B: Atomic Spectroscopy

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Fundamental comparison between non-equilibrium aspects of ICP and MIP discharges

Cited by 72 publications

References 41 publications

Rayleigh scattering on a microwave surfatron plasma to obtain axial profiles of the atom density and temperature

Rayleigh scattering on a microwave surfatron plasma to obtain axial profiles of the atom density and temperature

Effect of remote field electromagnetic boundary conditions on microwave-induced plasma torches

High-resolution electron density and temperature maps of a microwave plasma torch measured with a 2-D Thomson scattering system

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