“…With the advent of microelectronic manufacturing, various micromachining methods have been pursued for making miniaturized devices (Rai-Choudhury, 1994;Roy et al, 2001;Chang et al, 2008). The various machining techniques presently used can be classified into two categories, namely, physical processing and chemical processing (Pandey and Shan, 1980;Uno et al, 1996), of which wet chemical etching is the widely used method for micromachining (Williams et al, 2003). These well-established processes require chemical or thermoelectric energy to be concentrated at the machining point.…”