Gas sensing properties of pseudo-Schottky diodes on p-type indium phosphide substrates

Talazac, L.; Barbarin, F.; Varenne, Christelle; Mazet, Lionel; Pellier, Serge; Soulier, Christophe

doi:10.1016/s0925-4005(01)01055-3

Cited by 19 publications

(13 citation statements)

References 15 publications

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“…This current increase can be attributed to the decrease of the Schottky barrier height of the rectifying contact, consequence of a charge transfer between gaseous molecules and the intercalated -InP layer. Sensitivity ( ) of such structure to a 50 ppb step at 100 C is 1.66, but kinetics is slow leading to response and recovery times beyond 1 h. Reproducibility of the results is excellent during the first months of use, but sensing performances deteriorate after several months of continuous use, as mentioned in a previous study [12].…”

Section: )supporting

confidence: 64%

“…We have shown [12] that none of the tested gases (CO, , , , and moisture) could induce appreciable changes of the current of the diodes, even when present in large quantities. At first sight, the poor sensitivity observed for ( corresponding to a decrease of the measured current for a concentration of 1000 ppm in ) may seem surprising.…”

Section: ) Effect Of Other Gasesmentioning

confidence: 87%

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Improvement in Sensitivity and Selectivity of InP-Based Gas Sensors: Pseudo-Schottky Diodes With Palladium Metallizations

Talazac¹,

Barbarin²,

Mazet³

et al. 2004

IEEE Sensors J.

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The possibility of using single resistive -type InP semiconductor gas sensors to perform accurate measurements of ozone or nitrogen dioxide concentration in air comes up against their low sensitivity and the inability to discriminate between the influence of each gas on the sensors without any exterior apparatus. To improve these two fundamental aspects of gas sensors, the sensitive -InP layers have been included in more complex devices, called pseudo-Schottky diodes. Made by successive evaporation of metallic thin layers on -InP substrates, their Schottky metallization schemes (Pd/Ge/Pd) satisfy a double objective: the creation of the necessary -InP gas sensitive layer by activation of Ge dopants and the ozone catalytic conversion by palladium layers. Comparisons between the sensing performances of the two gas sensors (resistive and Schottky diode-type ones) show that sensitivity of the laters is largely higher than that of single resistive gas sensors. On the other hand, a good selectivity toward ozone is achieved with Pd/Ge/Pd/ -InP gas sensors, resulting from different reaction kinetics between O 3 or NO 2 and the sensitive layer. These differences can be attributed to the palladium metallization catalytic activity.

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Section: )supporting

confidence: 64%

Section: ) Effect Of Other Gasesmentioning

confidence: 87%

Improvement in Sensitivity and Selectivity of InP-Based Gas Sensors: Pseudo-Schottky Diodes With Palladium Metallizations

Talazac¹,

Barbarin²,

Mazet³

et al. 2004

IEEE Sensors J.

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“…The atomic hydrogen diffuses into the metal/metal oxide junction and reduces the catalytic metal work function. The Schottky energy barrier changes due to the reduction of metal work function and this change can be measured by I-V, C-V, or any other electrical mode [14][15][16].…”

Section: Schottky Type Gas Sensorsmentioning

confidence: 99%

Nanocrystalline Metal Oxides for Methane Sensors: Role of Noble Metals

Basu

2009

Journal of Sensors

133

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Methane is an important gas for domestic and industrial applications and its source is mainly coalmines. Since methane is extremely inflammable in the coalmine atmosphere, it is essential to develop a reliable and relatively inexpensive chemical gas sensor to detect this inflammable gas below its explosion amount in air. The metal oxides have been proved to be potential materials for the development of commercial gas sensors. The functional properties of the metal oxide-based gas sensors can be improved not only by tailoring the crystal size of metal oxides but also by incorporating the noble metal catalyst on nanocrystalline metal oxide matrix. It was observed that the surface modification of nanocrystalline metal oxide thin films by noble metal sensitizers and the use of a noble metal catalytic contact as electrode reduce the operating temperatures appreciably and improve the sensing properties. This review article concentrates on the nanocrystalline metal oxide methane sensors and the role of noble metals on the sensing properties.

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“…In view of the pollutants consequences on human health, the detection of the presence and the measurement of toxic gases (such as NO 2 , O 3 …) have become essential for environmental protection. In recent years, the concentration of NO x gases (NO and NO 2 ) in atmosphere has increased with increase in traffic and the number of buildings.…”

Section: Introductionmentioning

confidence: 99%

“…Nitrogen oxides cause lung irritations, decrease the fixation of oxygen molecules on red blood cells, increase the susceptibility to infections, contribute to acid rains and play an important role in the formation of ozone in the lower atmosphere [1]. In air quality monitoring, epitaxial InP based sensors have demonstrated their oxidizing gases (NO 2 , O 2 , O 3 ) detection efficiency [1,2]. According to previous laboratory experiments [3,4], the InP based resistive gas sensor is sensitive to nitrogen dioxide.…”

Section: Introductionmentioning

confidence: 99%

NO2 gas sensing studies: Impact of geometrical and physical characteristics of ohmic contacts on n-InP epitaxial sensitive layer

Berry

Brunet

Varenne

et al. 2007

Materials Science and Engineering: C

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This paper deals with the influence of technological process steps on electrical and metrological parameters of NO 2 gas sensors. The NO 2 gas sensors are based on thin n-InP epitaxial layers. The NO 2 gas action makes the resistance of the device, measured in parallel to the surface between ohmic contacts, increase. It is demonstrated that the methodology of fabrication modifies the geometrical and physical parameters of ohmic contacts and the reproducibility of the devices. The impact on the gas sensors in response to NO 2 is also discussed.

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Gas sensing properties of pseudo-Schottky diodes on p-type indium phosphide substrates

Cited by 19 publications

References 15 publications

Improvement in Sensitivity and Selectivity of InP-Based Gas Sensors: Pseudo-Schottky Diodes With Palladium Metallizations

Improvement in Sensitivity and Selectivity of InP-Based Gas Sensors: Pseudo-Schottky Diodes With Palladium Metallizations

Nanocrystalline Metal Oxides for Methane Sensors: Role of Noble Metals

NO2 gas sensing studies: Impact of geometrical and physical characteristics of ohmic contacts on n-InP epitaxial sensitive layer

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