“…Moreover, providing a cost-effective fabrication process for industrial perspectives should be considered. Various nanostructures, namely nanoparticles (NPs) [19,20], nanotubes (NTs) [21,22], nanowires (NWs) [23,24], and nanosheets (NSHs) [25,26], show good sensitivity to the different gases. Among all these nanostructures, silicon nanowires (SiNWs) have demonstrated substantial advantages due to their need for relatively standard processing techniques, which allows for integration with standard complementary metal oxide semiconductor (CMOS) processes for very large scale production [27,28].…”