Photon Processing in Microelectronics and Photonics 2002
DOI: 10.1117/12.470668
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General concept of a surface microgeometry reconstruction based on laser technology

Abstract: Surface of solids play a leading role in any process of interaction between solids, solids-liquids, solids-gases and solids-plasma. Microgeometry (roughness) is a key parameter of the solids surface which influence a lot mechanical, optical, electronic, chemical, thermical and other characteristics.Nowadays the laser-based technologies is a great challenge to improve a surface microgeometry (SM) quality and controllability.Different laser-based surface processing are considered: -surface microstructuring and c… Show more

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