Generation of charged clusters during thermal evaporation of gold

Barnes, Mark C.; Jeon, In-D.; Kim, Doh-Y.; Hwang, Nong M.

doi:10.1016/s0022-0248(02)01417-3

Cited by 19 publications

(19 citation statements)

References 21 publications

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“…Positive particles occur already at wire temperatures much lower than those predicted by electron or ion thermoemission theory. Elsewhere similar thermal charging effects are reported for aerosols (Magnusson, Deppert, Malm, Bovin, & Samuelson, 1999;Schiel, Weber, Kasper, & Schmid, 2002) and during thin film production from thermal sources (Barnes, Jeon, Kim, & Hwang, 2002;Jeon, Barnes, Kim, & Hwang, 2003;Jeon, Kim, & Hwang, 2005).…”

Section: Introductionsupporting

confidence: 69%

Explanation of charged nanoparticle production from hot surfaces

Peineke

Schmidt‐Ott

2008

Journal of Aerosol Science

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Section: Introductionsupporting

confidence: 69%

Explanation of charged nanoparticle production from hot surfaces

Peineke

Schmidt‐Ott

2008

Journal of Aerosol Science

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“…As pointed out previously [9], the electric bias can affect the charging behavior during evaporation because charged atoms or clusters are repelled or attracted toward the sub-strates, which diminishes the chance for them to collide with neutral atoms or clusters. In order to examine the formation of charged clusters without being affected by the applied bias, the bias experiment was also done in the second chamber after dividing the reactor into two chambers by a cone of 44 mm diameter with an orifice of 1.5 mm in diameter [9].…”

Section: Methodsmentioning

confidence: 89%

“…The generation of charged atoms or clusters during thermal evaporation of copper [10] and gold [9] was confirmed by the effect of an applied electric bias on the deposition behavior. The positive charge carried by the evaporated atoms or clusters could be measured by the electric current.…”

Section: Introductionmentioning

confidence: 87%

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Spontaneous generation of charged atoms or clusters during thermal evaporation of silver

Jeon¹,

Kim²,

Hwang³

2005

MEKU

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Spontaneous generation of charged atoms or clusters was investigated during thermal evaporation of silver. For this, the effect of the applied electric bias on the film growth rate was examined during evaporation of silver at 1373 K in a tungsten basket. Film growth rates on three silicon substrates biased + 300, 0 and À300 V with respect to the chamber were 300, 420 and 960 nm per hour, respectively. The number density of generated positively-charged atoms or clusters could be measured by the electric current on the Faraday cup in the chamber. From the temperature dependence of the positive current, the activation energy for charging was determined to be~2.2 eV. This value could be best explained by the surface ionization of clusters of a few atoms on the oxidized tungsten surface.

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“…This is related to the high proportion of surface atoms, which are weakly bound and less constrained. [21][22][23] The morphology of the surface of the gold layer on the cantilever was also studied as a function of the thickness and for a constant deposition rate of 0.02 nm/ s. Figure 2 shows the AFM topographic images of the most representative thicknesses. The 20 nm thick gold film exhibits a granular surface, in which the grain boundaries are well defined.…”

Section: A Morphology Of the Gold Filmmentioning

confidence: 99%

Role of the gold film nanostructure on the nanomechanical response of microcantilever sensors

Mertens

Calleja

Ramos

et al. 2007

Journal of Applied Physics

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In this study, we have determined the relationship between the nanostructure of the gold film deposited on microcantilevers and the sensitivity and reproducibility of their static response to molecular adsorption. In order to tune the properties of the gold film, gold was deposited at different rates and thicknesses. The cantilever response to molecular adsorption was characterized by exposure of the cantilevers to mercaptohexanol in water. The morphology of the gold surface was characterized by atomic force microscopy, and the residual stress induced in the cantilevers was characterized by a profilometry technique based on the optical beam deflection method. We have found that the discontinuous morphology of the gold film for small thicknesses and low deposition rates gives rise to large values of residual tensile stress due to the formation of grain boundaries at the expense of strain energy. These cantilevers exhibit the highest sensitivity and reproducibility to molecular adsorption. However, larger thicknesses and higher deposition rates produce the coalescence of gold nanoislands via atom diffusion. This is characterized by a large relative decrease ͑increase͒ of the tensile ͑compressive͒ stress. These cantilevers exhibit small sensitivity and low reproducibility to molecular adsorption. We conclude that the control of the gold coating process is critical for the reliability of the measurements with nanomechanical sensors.

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Generation of charged clusters during thermal evaporation of gold

Cited by 19 publications

References 21 publications

Explanation of charged nanoparticle production from hot surfaces

Explanation of charged nanoparticle production from hot surfaces

Spontaneous generation of charged atoms or clusters during thermal evaporation of silver

Role of the gold film nanostructure on the nanomechanical response of microcantilever sensors

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