2006
DOI: 10.1179/174328406x130894
|View full text |Cite
|
Sign up to set email alerts
|

Geometrically caused image distortion effects and their influence on interpretation of EBSD measurements

Abstract: The imaging of high tilted flat sample surfaces in scanning electron microscopy has some special characteristics. A typical example is the trapezium distortion which is only detectable at low magnifications. In contrast to this, a rhomboidal distortion is discussed in the present paper which appears independent of the magnification used. Rhomboidal distortion is also caused by a simple geometrical misalignment, an additional slight tilt of the sample surface out of the plane of the microscope stage or the pret… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
9
0

Year Published

2018
2018
2022
2022

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 14 publications
(9 citation statements)
references
References 13 publications
0
9
0
Order By: Relevance
“…Relative to H-DIC data, EBSD data is subject to more complex distortions that are induced by the physical positioning of the stage, the magnetic lenses of the microscope as well as charging phenomena that occur during scanning [38][39][40][41]. The resulting distortion can be modeled by a polynomial function of degree 3, which shape is shown in Eq.…”
Section: Correction Of the Distortions In Ebsd Datamentioning
confidence: 99%
“…Relative to H-DIC data, EBSD data is subject to more complex distortions that are induced by the physical positioning of the stage, the magnetic lenses of the microscope as well as charging phenomena that occur during scanning [38][39][40][41]. The resulting distortion can be modeled by a polynomial function of degree 3, which shape is shown in Eq.…”
Section: Correction Of the Distortions In Ebsd Datamentioning
confidence: 99%
“…The tilt correction has since been incorporated as a basic function in standard SEMs. Trapezoidal distortion has been analyzed theoretically [18,19]. However, the uncertainty in tilt correction has not been studied.…”
Section: Introductionmentioning
confidence: 99%
“…However, a limiting factor in mapping EBSD onto other image-based data is posed by spatial distortions in the EBSD data. The 70°specimen tilt during the measurement resulting in a position-dependent WD, in conjunction with electron Larmor precession, causes such distortions [21]. These are amplified by specimen surface curvature that is prominent in the vicinity of specimen edges.…”
Section: Specimen Fabrication and Characterizationmentioning
confidence: 99%