2021
DOI: 10.1021/acsami.1c01085
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Growth-Temperature Dependent Unpassivated Oxygen Bonds Determine the Gas Sensing Abilities of Chemical Vapor Deposition-Grown CuO Thin Films

Abstract: CuO is a multifunctional metal oxide excellent for chemiresistive gas sensors. In this work, we report CuO-based NO 2 sensors fabricated via chemical vapor deposition (CVD). CVD allows great control on composition, stoichiometry, impurity, roughness, and grain size of films. This endows sensors with high selectivity, responsivity, sensitivity, and repeatability, low hysteresis, and quick recovery. All these are achieved without the need of expensive and unscalable nanostructures, or heterojunctions, with a tec… Show more

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Cited by 29 publications
(16 citation statements)
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“…As a result, safety precautions must be taken when venting and releasing by-products [ 12 ]. CVD techniques have been used to grow many p-type MOX thin films, including CuO, NiO, Cr 2 O 3 , and Co 3 O 4 [ 49 ].…”
Section: Synthesis Of P-type Mox Thin Filmsmentioning
confidence: 99%
See 2 more Smart Citations
“…As a result, safety precautions must be taken when venting and releasing by-products [ 12 ]. CVD techniques have been used to grow many p-type MOX thin films, including CuO, NiO, Cr 2 O 3 , and Co 3 O 4 [ 49 ].…”
Section: Synthesis Of P-type Mox Thin Filmsmentioning
confidence: 99%
“…Substrate temperature greatly affects the diffusion and tunes the final morphology of crystalline thin films. In this context, CVD was utilized to prepare CuO thin films by vaporizing Cu(acac) 2 precursor on a glass substrate heated to temperatures ranging between 350 °C and 650 °C [ 49 ]. Tenorite CuO was formed at all temperatures; however, the highest temperatures produced thin films with smooth surfaces and large grains with high crystallinity.…”
Section: Synthesis Of P-type Mox Thin Filmsmentioning
confidence: 99%
See 1 more Smart Citation
“…CVD also gives the freedom to control supersaturation, so crystallinity, morphology, and grain size can be engineered, which play a significant role in device performance. Unfortunately, there have been very few demonstrations of CuO CVD, 11 especially for gas sensors (see Table 1).…”
Section: Introductionmentioning
confidence: 99%
“…Cupric oxide (CuO) is a rare transition-metal oxide with a measurable hole mobility and a low band gap of 1.2–1.9 eV . CuO thin films are used in p-type thin-film transistors, , solar cells, , photocatalyst, , and gas sensors. For all of these applications, the quality of thin film is crucial for determining the device performance.…”
Section: Introductionmentioning
confidence: 99%