2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) 2017
DOI: 10.1109/marss.2017.8001901
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Hardness determination at nanoscale by ultrasonic vibration-assisted AFM

Abstract: Abstract-Mechanical properties at nanoscale are crucial fators in the applications such as nanoscale interconnects and active components in electronic, optoelectronic, and electromechanical devices. Determination of the hardness of nanostructures, especially nano-thin-film, with regime from several to hundreds nanometers is a challenge. In this study, we proposed an ultrasonic vibration (USV)-assisted atomic force microscopy (AFM) method to measure the hardness of bulk materials and nano-thin-film with the thi… Show more

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