2006
DOI: 10.1117/12.685941
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Haze detection and haze-induced process latitude variation for low-k 1 193 nm lithography

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“…Biofuel can be derived from these commodity crops, such as soybean [4], rapeseed oil [5], palm oil, sunflower [6], jathropa [7][8], even from coffee [9]. However, CPO-based biodiesel is the strongest candidates to be developed, because this commodity has a relatively low production cost and has equal performance compared with diesel fuel properties, therefore engine modification is relatively minimum [7,10].…”
Section: Introductionmentioning
confidence: 99%
“…Biofuel can be derived from these commodity crops, such as soybean [4], rapeseed oil [5], palm oil, sunflower [6], jathropa [7][8], even from coffee [9]. However, CPO-based biodiesel is the strongest candidates to be developed, because this commodity has a relatively low production cost and has equal performance compared with diesel fuel properties, therefore engine modification is relatively minimum [7,10].…”
Section: Introductionmentioning
confidence: 99%