2024 IEEE International Memory Workshop (IMW) 2024
DOI: 10.1109/imw59701.2024.10536958
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Heterogeneous Oxide Semiconductor FETs Comprising Planar FET and Vertical Channel FETs Monolithically Stacked on Si CMOS, Enabling 1-Mbit 3D DRAM

Hiroki Inoue,
Takeya Hirose,
Toshiki Mizuguchi
et al.
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