2017
DOI: 10.1038/micronano.2017.38
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Hexagonal boron nitride nanomechanical resonators with spatially visualized motion

Abstract: Atomic layers of hexagonal boron nitride (h-BN) crystal are excellent candidates for structural materials as enabling ultrathin, two-dimensional (2D) nanoelectromechanical systems (NEMS) due to the outstanding mechanical properties and very wide bandgap (5.9 eV) of h-BN. In this work, we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies (from~5 to~70 MHz), and investigations of the elastic properties of h-BN by measuring the multimode resonan… Show more

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Cited by 81 publications
(93 citation statements)
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“…Following a similar strategy for displacement estimation, we employ a well-investigated h-BN drumhead resonator as reference and calibrate the transduction gain or conversion loss of the system. 7 The h-BN drumhead resonator shares similar diameter as the unit cell of the phononic waveguide and is measured under similar excitation and detection conditions in the same laser interferometry system. Therefore, we assume the system transmission can be canceled out by comparing the total transmission of these two devices and compensating the differences in the optical interferometry responsivity ( dis-opt  ) (as discussed in Subsection III.5).…”
Section: Transduction Analysis and Transmission Estimationmentioning
confidence: 99%
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“…Following a similar strategy for displacement estimation, we employ a well-investigated h-BN drumhead resonator as reference and calibrate the transduction gain or conversion loss of the system. 7 The h-BN drumhead resonator shares similar diameter as the unit cell of the phononic waveguide and is measured under similar excitation and detection conditions in the same laser interferometry system. Therefore, we assume the system transmission can be canceled out by comparing the total transmission of these two devices and compensating the differences in the optical interferometry responsivity ( dis-opt  ) (as discussed in Subsection III.5).…”
Section: Transduction Analysis and Transmission Estimationmentioning
confidence: 99%
“…The considerable research efforts on exploring the unconventional properties of van der Waals (vdW) layered materials have already led to exciting breakthroughs across a variety of disciplines from fundamental science to device engineering [1,2,3,4,5,6]. Among families of vdW crystals, hexagonal boron nitride (h-BN), having prevailed as gate dielectric and passivation layers in twodimensional (2D) electronics and optoelectronics [7], is emerging as an attractive material platform for nanophotonics and quantum optics [8,9,10]. The ultrawide bandgap (5.9 eV) of h-BN is beneficial not only for providing excellent electrical insulation, but also for hosting robust single photon emitters (SPEs) even at room temperature [10].…”
mentioning
confidence: 99%
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“…We use a 633nm laser to interferometrically resolve the device motion, which is detected by a sensitive PD. For detecting the undriven thermomechanical motion, only the 633nm laser is employed, with the signal PD output being fed to a spectrum analyzer [9,15,16]. In the driven response measurement (path ① in Fig.…”
Section: Introductionmentioning
confidence: 99%
“…In the driven response measurement (path ① in Fig. 2), a network analyzer is used to modulate the intensity of an amplitude-modulated 405nm laser in order to photothermally drive the nanoflake, and then detect the device motion using the 633nm laser through the PD [16].…”
Section: Introductionmentioning
confidence: 99%