High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements

Lin, Jieyu; Lee, Xuan Wei; Hsieh, Meng Chang; Cheng, Ching-An

doi:10.1016/j.sna.2018.05.012

Cited by 4 publications

(1 citation statement)

References 11 publications

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“…An autocollimator is customarily used for measurement of straightness, flatness and angular position [11]. As mentioned, the principles of interferometry and internal-reflection have been transformed into the displacement measurement field [12][13][14][15]. However, seldom has the autocollimator principle been studied in the field of displacement measurement.…”

Section: Introductionmentioning

confidence: 99%

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

et al. 2019

Applied Sciences

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The micro-displacement measurement system with 2D/3D has become increasingly important in the field of scientific research and technology application. In order to explore the application of an optical surface in micro-displacement measurement, a novel and simple 2D micro-displacement measurement method based on the elliptical paraboloid was designed and subjected to experiment. The measurement system takes advantage of the elliptical paraboloid instead of a plane mirror in the optical structure of an autocollimator which has been ameliorated to adapt to curved surface measurement. Through the displacement of the light spot on the CCD (Charge Coupled Device) detector, the displacement of the target could be measured with a linear correlation coefficient of 0.9999. The accuracy of the system is about ± 0.3 µm in a wide range in two dimensions. The results were in good agreement with the theoretical analysis and indicated the potential applicability of the proposed system in the detection of geometric errors of CNC (Computerized Numerical Control) machine tools.

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Section: Introductionmentioning

confidence: 99%

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

et al. 2019

Applied Sciences

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Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement

Lee

Hung

2020

Optics & Laser Technology

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Virtual prototyping of vision-based tactile sensors design for robotic-assisted precision machining

Zaid,

Sajwani,

Halwani

et al. 2024

Sensors and Actuators A: Physical

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High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements

Cited by 4 publications

References 11 publications

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement

Virtual prototyping of vision-based tactile sensors design for robotic-assisted precision machining

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