High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips

Namba, Tohru; Uehara, Akihito; Doi, Takeshi; Nagata, Takahiko; Kuroda, Yasuhide; Miyazaki, Seiichi; Shibahara, Kentaro; Yokoyama, Shiyoshi; Iwata, Atsushi; Hirose, Masataka

doi:10.7567/ssdm.1995.c-5-2

Cited by 2 publications

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“…The measured average losses of the single-reflection and the double-reflection mirror were 2.1 and 1.2 dB, respectively. The double-reflection mirror results in lower optical loss than the single-reflection mirror, as expected [9]. It is important to lower the loss of the micromirrors because the mirror loss directly affects the insertion loss of arrayed waveguides.…”

Section: Resultssupporting

confidence: 54%

“…Integrated turning mirrors have many applications in integrated optical systems because the 90 directional change of light is essential to compact photonic devices [8]. We adopted the double-reflection mirrors with air medium for high reflectivity [9]. One of the advantages of the arrayed waveguides with mirrors is relatively uniform insertion loss through the optical channels because the deviation of the insertion loss is not dependent on the location of mirrors.…”

mentioning

confidence: 99%

“…We designed two types of micromirrors: single-reflection and double-reflection. The double-reflection mirror is expected to have higher reflectivity than the single-reflection mirror [9]. In order to improve the reflection efficiency of the mirrors, the upper cladding layer near the reflecting mirrors was etched out to form air cladding.…”

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confidence: 99%

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Stacked Polymeric Multimode Waveguide Arrays for Two-Dimensional Optical Interconnects

Kim

2004

J. Lightwave Technol.

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Section: Resultssupporting

confidence: 54%

mentioning

confidence: 99%

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Stacked Polymeric Multimode Waveguide Arrays for Two-Dimensional Optical Interconnects

Kim

2004

J. Lightwave Technol.

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“…We designed two types of the micromirrors; singlereflection and double-reflection mirror. The double-reflection mirror is expected to have higher reflectivity than the single-reflection mirror [9]. In order to improve the reflection efficiency of the mirrors the upper cladding layer near the reflecting mirrors was etched out to form air cladding.…”

Section: Two Dimensional Optical Interconnects [16]mentioning

confidence: 99%

Polymeric multimode waveguide arrays for one- and two-dimensional optical interconnects

Kim

2004

SPIE Proceedings

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Polymeric optical multimode waveguide arrays with micromirrors have been fabricated for one-(1-D) and twodimensional (-2D) optical interconnects between 1-D or 2-D arrayed VCSELs and detectors. Contact printing lithography was adopted for simple and low cost process using UV-curable epoxy based polymers. Micromirrors for 1-D optical interconnects were fabricated by dicing a waveguide array using a dicing saw with a 45° diamond blade and showed the excess loss of 1.1 dB. For 2-D interconnects, fabricated waveguides were diced of same size and stacked one by one with lateral positional errors less than ± 20 ㎛ . Two kinds of mirrors were fabricated; single-reflection mirror and double-reflection mirror. Double reflected mirrors resulted in lower losses with 1.2 dB than single reflected mirrors with 2.1 dB. The average insertion losses of 16-channel arrayed waveguides with two single-reflection mirrors and with two double-reflection-mirrors were measured to be 6.1 dB and 4.4 dB for 6 cm long waveguides at a wavelength of 830 nm, respectively. The crosstalk between the waveguides was less than -25 dB. The characteristics of the waveguide arrays are good enough for applications to optical interconnects.

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High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips

Cited by 2 publications

References 0 publications

Stacked Polymeric Multimode Waveguide Arrays for Two-Dimensional Optical Interconnects

Stacked Polymeric Multimode Waveguide Arrays for Two-Dimensional Optical Interconnects

Polymeric multimode waveguide arrays for one- and two-dimensional optical interconnects

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