High efficiency resonance-based spectrum filters with tunable transmission bandwidth fabricated using nanoimprint lithography

Abstract

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Ultrathin Nanostructured Metals for Highly Transmissive Plasmonic Subtractive Color Filters

“…Figure 1 (c) presents measured transmission spectra of the cyan (P 5 350 nm), magenta (P 5 270 nm) and yellow (P 5 230 nm) plasmonic SCFs under TMpolarization (Supplementary Figure S2), with transmission minima that are positioned in red, green, and blue spectral regions, respectively. Note that the observed absolute peak transmission, 60 , 70% in the visible region, represent an unusually high transmission efficiency for such structures 2,3,[6][7][8][9][10][11][12][13][14] . The full-widths at half maximum (FWHM) of the stopbands are approximately 100 nm for yellow and cyan SCFs, and 160 nm for magenta SCFs, which are comparable to the passband width for state-of-art plasmonic ACFs 2,3 .…”

“…Plate-like dielectric deflectors have recently been proposed 1 , but this scheme suffers from intrinsic limitations due to poor color purity, since the deflector covers only half of the total area. Nanoplasmonic color filters have been proposed recently as a promising means of overcoming the above limitations [2][3][4][5][6][7][8][9][10][11] . The well-known extraordinary optical transmission (EOT) phenomenon [12][13][14] , observed in a single opticallythick metal film perforated with a periodic subwavelength hole array, has been extensively studied for additive color filtering (ACF) applications over the past decade.…”

“…The well-known extraordinary optical transmission (EOT) phenomenon [12][13][14] , observed in a single opticallythick metal film perforated with a periodic subwavelength hole array, has been extensively studied for additive color filtering (ACF) applications over the past decade. Such plasmonic color filters reject the entire visible spectrum except for selective transmission bands that are associated with the excitation of surface plasmon polaritons (SPPs) 2,[6][7][8][9][10][11][12][13][14] . These EOT transmission bands can be spectrally tuned throughout the entire visible spectrum by simply adjusting geometric parameters, such as the periodicity, shape and size of nanoholes, leading to the high color tunability.…”

Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography

“…Authors have investigated the use of different metals (Au [2], Ag [3][4][5][6][7][8], Al [9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25]) and various aperture forms such as lines [4,5,10,24], circles [7, 9, 11, 14-16, 21, 25], triangles [12] and crosses [17,18,23]. Alternatively, a similar filtering behaviour can also be achieved by the formation of subwavelength metal islands [8,20].…”

“…Very often serial techniques like focused ion beam (FIB) [3,10,15,21], electron beam lithography [9,11,12,14,24,25] or advanced optical lithography [22,26] as well as x-ray lithography [8] have been used in the fabrication process, including their intrinsic limitations in terms of patterning area or process time. Other approaches rely on parallel lithography techniques like nanoimprint lithography (NIL) [4,18] or laser interference lithography (LIL) [16], thereby enabling the time efficient patterning of larger areas. However, the maximum active areas of the filters presented in literature remain in the order of a few cm 2 .…”