Optoelectronic Devices and Integration XII 2023
DOI: 10.1117/12.2689122
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High-efficiency silicon nitride grating coupler for perfectly vertical coupling

Jinghao Wang,
Zhen Wang,
Chen Hu
et al.

Abstract: We demonstrate a high-efficiency silicon nitride grating coupler for perfectly vertical coupling. The directionality of the diffraction process is improved with the help of the bottom mirror and Bragg reflectors introduced in the design, leading to the minimal coupling loss of -0.52 dB at 1315.6 nm.

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