High Frequency Capacitance Measurements On Metal-Insulator-Semiconductor Structures In Thermal Non-Equilibrium Condition

Abstract

We simulate the charge carrier traffic between the energy bands and the interface states in structures like Al/SiO2/6H-SiC, Al/diamond/Si and Al/SIPOS/Si to explain their high frequency capacitance-voltage behavior. The structures have in common that traditional electrical measurement techniques performed at room temperature are strongly influenced by non-equilibrium carrier conditions at the insulator-semiconductor interface. This can result in large errors in the interface data extracted from such studies when thermal equilibrium conditions are assumed. In this work, high frequency capacitance-voltage data are compared to numerical simulations which include such thermal non-equilibrium conditions to enable more accurate estimates of interface state parameters in such structures.