2021
DOI: 10.1007/s10854-020-05068-x
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High mobility Ti, Zr and Ga-codoping In2O3 transparent conductive oxide films prepared at low temperatures

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Cited by 11 publications
(1 citation statement)
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“…ZnO (JCPDS File 36-1451) has a distinct hexagonal wurtzite structure with a prominent diffraction peak at 34.42°, corresponding to the (002) orientation, whereas the cubic In 2 O 3 powder pattern (JCPDS File 06-0416) exhibits preferred orientation along the (222) plane at 30.6°. [17][18][19][20] The intensity of the (222) peak in the stack structure gradually increases with increasing IWO thickness, indicating an enhancement in the crystallinity of the IWO film. As the total stack thickness remains constant, an increase in the IWO thickness leads to a reduction in the GZO film thickness, resulting in a corresponding decrease in the intensity of the (002) preferential orientation peak.…”
Section: Stack Crystallite Structurementioning
confidence: 99%
“…ZnO (JCPDS File 36-1451) has a distinct hexagonal wurtzite structure with a prominent diffraction peak at 34.42°, corresponding to the (002) orientation, whereas the cubic In 2 O 3 powder pattern (JCPDS File 06-0416) exhibits preferred orientation along the (222) plane at 30.6°. [17][18][19][20] The intensity of the (222) peak in the stack structure gradually increases with increasing IWO thickness, indicating an enhancement in the crystallinity of the IWO film. As the total stack thickness remains constant, an increase in the IWO thickness leads to a reduction in the GZO film thickness, resulting in a corresponding decrease in the intensity of the (002) preferential orientation peak.…”
Section: Stack Crystallite Structurementioning
confidence: 99%