2014
DOI: 10.1111/jace.13238
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High‐Performance (Na0.5K0.5)NbO3 Thin Film Piezoelectric Energy Harvester

Abstract: The pseudocubic structure of a (Na 0.5 K 0.5 )NbO 3 (NKN) film grown on a Pt/Ti/SiO 2 /Si substrate changed to an orthorhombic structure when the film was transferred onto a polyimide substrate. Piezoelectric constant for the transferred NKN film increased considerably from 74 AE 11 to 120 AE 18 pm/V because the crystal structure of the film had changed from pseudocubic to orthorhombic. A gold interdigitated electrode was deposited onto the transferred NKN film to synthesize a NKN piezoelectric energy harveste… Show more

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Cited by 29 publications
(14 citation statements)
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“…It is interesting to note that the d 33 value of the NKN film grown on the flexible TiN‐PI substrate (50 pm V −1 ) is larger than that of the NKN film grown on the rigid TiN‐Si substrate (25 pm V −1 ), as shown in Figure S9 (Supporting Information). This increased d 33 value may be explained by the removal of the constraint effect of the rigid TiN‐Si substrate, and a similar result was observed in the crystalline NKN film grown on the Pt‐Si substrate …”
Section: Nkn Piezoelectric Ngssupporting
confidence: 70%
“…It is interesting to note that the d 33 value of the NKN film grown on the flexible TiN‐PI substrate (50 pm V −1 ) is larger than that of the NKN film grown on the rigid TiN‐Si substrate (25 pm V −1 ), as shown in Figure S9 (Supporting Information). This increased d 33 value may be explained by the removal of the constraint effect of the rigid TiN‐Si substrate, and a similar result was observed in the crystalline NKN film grown on the Pt‐Si substrate …”
Section: Nkn Piezoelectric Ngssupporting
confidence: 70%
“…[ 96 ] Copyright 2020, Elsevier Ltd. h) Progress in the piezoelectric coefficient of lead‐free piezoelectric thin films over the recent years. [ 26,364,367,397,402–408 ]…”
Section: Challenges and Perspectivesmentioning
confidence: 99%
“…In the past few decades, lead zirconate titanate (PZT) thin films with excellent piezoelectric properties have dominated the commercial market of piezoelectric thin film devices. However, the high content of toxic lead composition in PZT raises environmental and human health concerns, thus increasing efforts are made to develop high performance lead‐free piezoelectric thin films as replacements . Among lead‐free piezoelectric ceramics, potassium sodium niobate, (K, Na)NbO 3 (KNN), is one of the most promising candidates with competitive piezoelectric properties over a broad temperature range, as obtained in KNN‐based bulk ceramics by constructing phase coexistence with complex chemical compositions .…”
Section: Introductionmentioning
confidence: 99%