High-power heterogeneously integrated waveguide-coupled balanced photodiodes on silicon-on-insulator

Abstract

We demonstrate InP-based modified uni-traveling carrier balanced photodiodes integrated on silicon-on-insulator (SOl) waveguides with an internal responsivity of 0.78 A/W, 14 GHz bandwidth, and >20 dB common-mode rejection ratio (CMRR). The unsaturated RF output power reaches 15.2 dBm at 20 GHz. Index Terms-High power photodiode, silicon photonics, microwave photonics