High power nanocrystalline diamond RF MEMS- A combined look at mechanical and microwave properties

Balachandran, Shreyas; Kusterer, J.; Maier, David; Dipalo, Michele; Weller, Thomas M.; Kohn, E.

doi:10.1109/comcas.2008.4562780

Cited by 4 publications

(3 citation statements)

References 13 publications

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“…MCD has the highest diamond-type quality among PCD films, indicated by the high intensity of the sp 3 peak at 1332 cm -1 and amorphous-like DLC film has the lowest diamond-like quality as indicated by the almost invisible sp 3 peak. Table 3 shows the basic properties of various amorphous and crystalline forms of carbon provided in references [2,36,[39][40][41][42][43].…”

Section: Diamond Propertiesmentioning

confidence: 99%

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Auciello

Aslam

2021

J Mater Sci

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A comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

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Section: Diamond Propertiesmentioning

confidence: 99%

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Auciello

Aslam

2021

J Mater Sci

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“…The RF-MEMS switch provides better performances such as low power consumption, high isolation, less noise, low insertion loss, high bandwidth than the conventional solid state PINdiode and FET switches [7][8]. However, for the designing and operation of RF-MEMS switch, it has also some disadvantages such as switching speed, low power handling capacity [9][10][11], electrostatic discharge [12][13], high actuation voltage, packaging and low switching lifetime [14]. In order to overcome [15][16].…”

Section: Introductionmentioning

confidence: 99%

Novel design and analysis of RF MEMS shunt capacitive switch for radar and satellite communications

Naji

Farhood

Ali

2019

IJEECS

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<span>In this paper, a new type of Radio Frequency Micro-Electro-Mechanical System (RF-MEMS) shunt capacitive switch is designed and studied. RF MEMS switch has a number of advantages in a modern telecommunication system such as low power consumption, easy to fabricate and power handling capacity at radio frequency. At high frequency applications, this switch shows very superior performance due to which it now became one of the key elements for RF application. In this proposed design, an innovative type of MEMS switch is designed. The MEMS switch structure consists of substrate, co-planar waveguide (CPW), dielectric material and a metallic bridge. The proposed MEMS switch has a dimension of 508 µm × 620 µm with a height of 500 µm. The substrate used is GaAs material. The relative permittivity of the substrate is 12.9. This proposed MEMS switch is designed and simulated in both UP (ON) state and DOWN (OFF) state. The proposed RF-MEMS switch is designed and simulated using Ansoft High frequency structure simulator (HFSS) electromagnetic simulator. The simulated result shows better performance parameters such as return loss ( <-10 dB) and insertion loss ( > -0.5 dB) in UP state, whereas return loss ( > -0.5 dB) and isolation (<-10 dB) in DOWN state. This switch has good isolation characteristics of – 43 dB at 27 GHz frequency.</span>

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“…MEMS switch can be employed in radio frequency RF circuits, and their performances could be made better than those of other standard switches such as FET, and PIN diodes [1][2]. In recent years, a large number of research have been done on MEMS switch to use as switching application at radio frequency due to the larger number of advantages such as low speed, zero power consumption, low insertion loss, high isolation and very low intermodulation over the convention switching devices [3][4][5]. In 1970"s , MEMS has been used for pressure and temperature sensors, accelerometers, gas chromatographs and sensor devices and MEMS switches for low frequency applications have also been established [6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Study of RF-MEMS Capacitive Shunt Switch for Microwave Backhaul Applications

Shah¹

2017

IOSR JECE

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High power nanocrystalline diamond RF MEMS- A combined look at mechanical and microwave properties

Cited by 4 publications

References 13 publications

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

Novel design and analysis of RF MEMS shunt capacitive switch for radar and satellite communications

Study of RF-MEMS Capacitive Shunt Switch for Microwave Backhaul Applications

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