High-precision, low-coherence Fizeau interferometer using a pulsed laser diode for measurement of transparent plates

Abstract

A high-precision, low-coherence Fizeau interferometer system using a pulsed laser diode has been developed for the measurement of the flatness of transparent plates. A pulsed laser diode with a wavelength of around 633 nm was used as the low-coherence light source. A Twyman-Green interferometer with the pulsed laser diode was connected to the Fizeau interferometer. By adjusting the optical path differences in both interferometers, the interference fringe pattern due only to the reference and measurement surfaces could be observed. The accuracy of the measurements was found to be similar to that of a conventional Fizeau interferometer.