High-Q SH-SAW Resonator Using 36° YX-LiTaO<sub>3</sub> on SiC

Wu, Zonglin; Wu, Shuxian; Qian, Hangyu; Bao, Feihong; Yang, Guo‐Min; Zou, Jie; Tang, Gongbin

doi:10.1109/eftf/ifcs54560.2022.9850800

Cited by 3 publications

(2 citation statements)

References 11 publications

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“…For comparison, the measurement taken from Ref. [28] is also presented. As shown, the admittance curves basically fit well, and there exists a small difference at the anti-frequency, which is mainly caused by a bulk wave.…”

Section: Model Verificationmentioning

confidence: 99%

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The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Li,

Zhang,

Yang

et al. 2023

Micromachines

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This paper presents an advanced method that combines coupling-of-modes (COM) theory and the finite element method (FEM), which enables the quick extraction of COM parameters and the accurate prediction of the electroacoustic and temperature behavior of surface acoustic wave (SAW) devices. For validation, firstly, the proposed method is performed for a normal SAW resonator. Then, the validated method is applied to analysis of an I.H.P. SAW resonator based on a 29°YX−LT/SiO2/SiC structure. Via optimization, the electromechanical coupling coefficient (K2) is increased up to 13.92% and a high quality (Q) value of 1265 is obtained; meanwhile, the corresponding temperature coefficient of frequency (TCF) is −10.67 ppm/°C. Furthermore, a double-mode SAW (DMS) filter with low insertion loss and excellent temperature stability is also produced. It is demonstrated that the proposed method is effective even for SAW devices with complex structures, providing a useful tool for the design of SAW devices with improved performance.

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Section: Model Verificationmentioning

confidence: 99%

“…Figure 4. An admittance comparison between the proposed COM method and measured results[28] for the SAW resonator on a 36 • YX−LT/SiO 2 /SiC multi-layered substrate.…”

mentioning

confidence: 99%

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Li,

Zhang,

Yang

et al. 2023

Micromachines

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Observation of Nonlinearity Induced by Transverse Modes in SAW Devices Based on 36°YX-LiTaO₃/SiO₂/SiC Structure

Li,

Lv,

Zhang

et al. 2024

2024 IEEE MTT-S International Conference on Microwave Acoustics &Amp;amp; Mechanics (IC-MAM)

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Comparative Study of SH-Mode Surface Acoustic Wave Resonators on Lithium Tantalate With Silicon and Silicon Carbide Substrates

Wu,

Qian

et al. 2024

IEEE Trans. Electron Devices

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High-Q SH-SAW Resonator Using 36° YX-LiTaO₃ on SiC

Cited by 3 publications

References 11 publications

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Observation of Nonlinearity Induced by Transverse Modes in SAW Devices Based on 36°YX-LiTaO₃/SiO₂/SiC Structure

Comparative Study of SH-Mode Surface Acoustic Wave Resonators on Lithium Tantalate With Silicon and Silicon Carbide Substrates

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High-Q SH-SAW Resonator Using 36° YX-LiTaO3 on SiC

Cited by 3 publications

References 11 publications

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Observation of Nonlinearity Induced by Transverse Modes in SAW Devices Based on 36°YX-LiTaO3/SiO2/SiC Structure

Comparative Study of SH-Mode Surface Acoustic Wave Resonators on Lithium Tantalate With Silicon and Silicon Carbide Substrates

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Product

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High-Q SH-SAW Resonator Using 36° YX-LiTaO₃ on SiC

Observation of Nonlinearity Induced by Transverse Modes in SAW Devices Based on 36°YX-LiTaO₃/SiO₂/SiC Structure