2012
DOI: 10.1364/oe.20.021214
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High quality factor 1-D Er^3+-activated dielectric microcavity fabricated by RF-sputtering

Abstract: Rare earth-activated 1-D photonic crystals were fabricated by RF-sputtering technique. The cavity is constituted by an Er3+-doped SiO2 active layer inserted between two Bragg reflectors consisting of ten pairs of SiO2/TiO2 layers. Scanning electron microscopy is employed to put in evidence the quality of the sample, the homogeneities of the layers thickness and the good adhesion among them. Near infrared transmittance and variable angle reflectance spectra confirm the presence of a stop band from 1500 nm to 20… Show more

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Cited by 66 publications
(59 citation statements)
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“…7,22 The final resolution on the effective thickness obtained by this quartz microbalance is about 4 Å. Sputtering deposition of the films was performed by sputtering alternatingly with a 15 × 5 cm 2 titania target and a 15 × 5 cm 2 silica target.…”
Section: Er 3+ -Activated Dielectric Microcavity Fabricated By Rf Spumentioning
confidence: 99%
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“…7,22 The final resolution on the effective thickness obtained by this quartz microbalance is about 4 Å. Sputtering deposition of the films was performed by sputtering alternatingly with a 15 × 5 cm 2 titania target and a 15 × 5 cm 2 silica target.…”
Section: Er 3+ -Activated Dielectric Microcavity Fabricated By Rf Spumentioning
confidence: 99%
“…Among these systems, planar microcavity resonators, also called (1-D) PCs, are the simplest photonic band-gap device exploitable to manage the spectroscopic properties of luminescent species such as rare earth ions, [4][5][6][7] and quantum dots. 8 Oxide-based dielectric materials are particularly suitable for fabricating PBG structures because they have wide transparency from the ultraviolet to the near infrared (NIR).…”
Section: Introductionmentioning
confidence: 99%
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“…The 1-D PCs can be fabricated by using different deposition techniques such as electron beam evaporation, sol-gel method, holography and r.f.-sputtering etc. The different materials used to fabricate 1-D PCs for OBGs in various frequency ranges are tellurium/polyethylene for infrared , TiO2/SiO2 (Valligatla et al, 2012) for near infrared (NIR) and TiO 2 /SiO 2 (Lin et al, 2005) for visible light. TiO 2 and SiO 2 are non-absorbing and nondispersive high and low index dielectric oxide materials having good refractive index contrast, and are used for E-mail: jppandeymlk@gmail.com.…”
Section: Introductionmentioning
confidence: 99%