1998
DOI: 10.1364/ol.23.000771
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High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50??nm

Abstract: Sc-Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35-50 nm. Fabricated mirrors show normal-incidence reflectivity of 30-54%, which is high enough for effective manipulation of the beams of compact-discharge, laser-driven x-ray lasers. The values obtained are not, however, limits for Sc-Si coatings. Theoretical estimations as well as electron microscopy studies of Sc-Si interfaces indicate a large potential for a further increase in their reflectivity.

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Cited by 88 publications
(58 citation statements)
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“…The Z-fold mirror set consists of two 1 in. diameter Sc/ Si multilayer mirrors with about 40% reflectivity each; 41 a planar mirror, placed 30.5 cm from a f = 50 cm concave mirror, focuses the incoming laser beam to the ionization region of the TOFMS. The use of these optics improves the experimental setup in three ways: ͑1͒ the two mirrors allow full directional control of the ionizing 46.9 nm bright beam in order to improve alignment ͑motor controls for the mirrors are external to the vacuum system͒; ͑2͒ improved intensity of the light beam at the ion source region by using a focusing mirror for a tight focal spot; and ͑3͒ a tight focal spot that results in sharp ͑ca.…”
Section: ͑A͒mentioning
confidence: 99%
“…The Z-fold mirror set consists of two 1 in. diameter Sc/ Si multilayer mirrors with about 40% reflectivity each; 41 a planar mirror, placed 30.5 cm from a f = 50 cm concave mirror, focuses the incoming laser beam to the ionization region of the TOFMS. The use of these optics improves the experimental setup in three ways: ͑1͒ the two mirrors allow full directional control of the ionizing 46.9 nm bright beam in order to improve alignment ͑motor controls for the mirrors are external to the vacuum system͒; ͑2͒ improved intensity of the light beam at the ion source region by using a focusing mirror for a tight focal spot; and ͑3͒ a tight focal spot that results in sharp ͑ca.…”
Section: ͑A͒mentioning
confidence: 99%
“…A 200 nm thick Al filter (Luxel Corp.) blocked any residual infrared light from reaching the XUV interaction chamber. After separating the infrared from the XUV harmonics, we select and focus the 21 st harmonic using a spherical Sc/Si multilayer mirror designed to reflect light at 38 nm ± 5 nm with f/10 geometry at near normal incidence [15].…”
Section: Methodsmentioning
confidence: 99%
“…Desétudes antérieures ont montré l'intérêt des multicouches Sc/Si pour ces longueurs d'onde et ont souligné les problèmes de stabilité thermique de ce type de structure [6][7][8]. Les deux solutions proposées dans la littérature pour améliorer cette stabilité est l'ajout de W [7] ou de Cr [8] aux deux interfaces Sc sur Si et Si sur Sc.…”
Section: Multicouchesà Base De Scandiumunclassified