High-Resolution Electron Beam Lithography and DNA Nano-Patterning for Molecular QCA

Hu, Wenchuang; Sarveswaran, Koshala; Lieberman, Marya; Bernstein, Gary H.

doi:10.1109/tnano.2005.847034

Cited by 76 publications

(35 citation statements)

References 22 publications

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“…At equal crosstalk levels, the QD devices may be spaced more closely at a factor of 0.39 less than 200 nm wide dielectric structures [50]. [52]. Additionally, creating multiple type QD devices through the method can take place by conjugating streptavidin coated QDs to biotinylated complementary DNA strands prior to assembly with a base DNA linked to the surface.…”

Section: Gain Modelingmentioning

confidence: 99%

Nanoscale waveguiding methods

Wang

Lin

2007

Nanoscale Res Lett

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While 32 nm lithography technology is on the horizon for integrated circuit (IC) fabrication, matching the pace for miniaturization with optics has been hampered by the diffraction limit. However, development of nanoscale components and guiding methods is burgeoning through advances in fabrication techniques and materials processing. As waveguiding presents the fundamental issue and cornerstone for ultra-high density photonic ICs, we examine the current state of methods in the field. Namely, plasmonic, metal slot and negative dielectric based waveguides as well as a few sub-micrometer techniques such as nanoribbons, high-index contrast and photonic crystals waveguides are investigated in terms of construction, transmission, and limitations. Furthermore, we discuss in detail quantum dot (QD) arrays as a gain-enabled and flexible means to transmit energy through straight paths and sharp bends. Modeling, fabrication and test results are provided and show that the QD waveguide may be effective as an alternate means to transfer light on sub-diffraction dimensions.

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Section: Gain Modelingmentioning

confidence: 99%

Nanoscale waveguiding methods

Wang

Lin

2007

Nanoscale Res Lett

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“…DNA hybridization between circuitboards will maintain subnm registry from one circuitboard to the next. [6] shows that silicon is a viable substrate for guided DNA tile binding.…”

Section: Guided Self-assembly For Systemsmentioning

confidence: 99%

“…In Section 4, we present simulation results that look at fundamental logic structures needed for a functionally complete logic set. In Section 5 we consider logic in the context of the device of [9,19] and the DNA-based scaffolding discussed in [6]. We conclude in Section 6.…”

Section: Introductionmentioning

confidence: 99%

Using CAD to Shape Experiments in Molecular QCA

Niemier

Crocker

et al. 2006

2006 IEEE/ACM International Conference on Computer Aided Design

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This paper examines how circuits and systems made from molecular QCA devices might function. Our design constraints are "chemically reasonable" in that we consider the characteristics and dimensions of devices and scaffoldings (circuit boards to attach devices to) that have actually been fabricated (currently in isolation). We will show that not only is the work presented here a necessary first step for any work in QCA CAD, but also that by considering issues related to design can actually help shape experiments in the physical sciences for emerging, nano-scale devices. Our work shows that circuits, scaffoldings, substrates, and devices must all be considered simultaneously. Otherwise, there is a very real possibility that the devices and scaffoldings that are eventually manufactured will result in devices that only work in isolation. This work is especially timely as experimentalists are currently working to merge the different experimental tracks -i.e. to selectively place a QCA device.

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“…PMMA ͑polymethylmethacrylate͒ is an important polymer because of its wide use as an electron resist for high resolution lithography [14][15][16][17][18][19] for forming patterns for microand nanodevices. Gold has been used as a dopant metal species for PMMA doping but not by using ion implantation as the doping mechanism.…”

Section: Introductionmentioning

confidence: 99%

Gold-implanted shallow conducting layers in polymethylmethacrylate

Teixeira

Salvadori

Cattani

et al. 2009

Journal of Applied Physics

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Characterization of bias stress induced electrical instability in liquid-crystalline semiconducting polymer thin-film transistors J. Appl. Phys. 110, 084511 (2011) Influence of crystallization-induced amorphous phase confinement on -and -relaxation molecular mobility in parylene F J. Appl. Phys. 110, 063703 (2011) Variability of physical characteristics of electro-sprayed poly(3-hexylthiophene) thin films J. Appl. Phys. 110, 054515 (2011) Metallic-like conduction in Co-phthalocyanine/Fe-phthalocyanine composite films grown on sapphire substrates Appl. Phys. Lett. 99, 112102 (2011) Theoretical study of substitution effects on molecular reorganization energy in organic semiconductors J. Chem. Phys. 135, 104703 (2011) Additional information on J. Appl. Phys. PMMA ͑polymethylmethacrylate͒ was ion implanted with gold at very low energy and over a range of different doses using a filtered cathodic arc metal plasma system. A nanometer scale conducting layer was formed, fully buried below the polymer surface at low implantation dose, and evolving to include a gold surface layer as the dose was increased. Depth profiles of the implanted material were calculated using the Dynamic TRIM computer simulation program. The electrical conductivity of the gold-implanted PMMA was measured in situ as a function of dose. Samples formed at a number of different doses were subsequently characterized by Rutherford backscattering spectrometry, and test patterns were formed on the polymer by electron beam lithography. Lithographic patterns were imaged by atomic force microscopy and demonstrated that the contrast properties of the lithography were well maintained in the surface-modified PMMA.

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High-Resolution Electron Beam Lithography and DNA Nano-Patterning for Molecular QCA

Cited by 76 publications

References 22 publications

Nanoscale waveguiding methods

Nanoscale waveguiding methods

Using CAD to Shape Experiments in Molecular QCA

Gold-implanted shallow conducting layers in polymethylmethacrylate

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