High resolution imaging with high energy ion beams

Legge, G.J.F.; Laird, J.S.; Mason, L.M.; Saint, A.; Cholewa, M.; Jamieson, David N.

doi:10.1016/0168-583x(93)95539-h

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The Beam Spot Radius1

Introduction1

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2008

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Cited by 43 publications

(2 citation statements)

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“…There are several methods to measure a beam profile [2,6,7] . However none of them is suitable for SIM because SIM emits only several ions each time.…”

Section: The Beam Spot Radiusmentioning

confidence: 99%

“…It is required to eliminate all possible influential factors in order to get such spots in microns. The beam energy instability is one of the most serious factors [2] which causes a wider beam spot and a shorter running time, and may even render the microbeam unable to work. Reducing the radius of the beam spot so as to improve the positioning precision is the key point for SIM development.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Improvement of the Energy Stability of the Single Ion Microbeam

Zhan

Xuehong

et al. 2008

Plasma Sci. Technol.

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“…There are several methods to measure a beam profile [2,6,7] . However none of them is suitable for SIM because SIM emits only several ions each time.…”

Section: The Beam Spot Radiusmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%