High-resolution mass spectrometer for liquid metal ion sources

Abstract

Recently, a mass spectrometer for liquid metal ion sources (LMIS) has been built and set into operation. This device uses an E × B-filter as mass dispersive element and provides sufficient resolution to analyse the emission of clusters from LMIS to much higher mass ranges (>2000 amu) than commercially available mass filters for focused ion beam systems. It has also been shown that for small masses the composition of clusters from different isotopes can be resolved. Furthermore, a rather high fluence of monodisperse clusters in the range of 10(6)-10(7) clusters/s can be achieved with this setup. This makes it a promising tool for the preparation of mass selected clusters. In this contribution, theoretical considerations as well as technical details and the results of first measurements are presented.

Development of an Energy-Sensitive Detector for the Atom Probe Tomography

“…These preliminary studies were aimed at observing the potential differences in SEY between different elements having very close mass-to-charge ratios. To do so, the fine control of specific elements, with specific energies, was performed through ion beam sources, also known as focused ion beams (FIBs; Ward et al, 1985; Wortmann et al, 2013).…”