High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film

Zhang, Peng; Hou, Huwang; Luo, Zhendong; Feng, Ye; Zhong, Hongmei; Zhang, Hui; Meng, Ting; Zhao, Yang

doi:10.1109/jmems.2024.3384497

J. Microelectromech. Syst.

2024

DOI: 10.1109/jmems.2024.3384497

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High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film

Peng Zhang,

Huwang Hou,

Zhendong Luo

et al.

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Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

Luo,

Hou,

Meng

et al. 2024

ACS Photonics

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The optomechanical uncooled infrared (IR) detector, based on the bimaterial microcantilever thermal deformation, has proved to have great potential due to the ability to measure IR using visible-spectral-range components. However, like most types of detectors, they encounter the common limitation of a low fill factor, leading to an inefficient utilization of light energy. The metalens, with a compact footprint, high design flexibility, and MEMS (microelectromechanical systems) compatibility, is expected to be integrated with IR detectors to enhance performance. Here, we present the design, fabrication, and characterization of a monolithic integration of a long-wavelength infrared (LWIR) micrometalens array and an optomechanical IR detector. A microfabrication process was developed to successfully prepare such an optomechanical IR detector with a monolithically integrated micrometalens array, where the micrometalens array was directly fabricated on the back of the detector substrate. Experimental results demonstrate that the integration of the micrometalens array markedly amplifies the responsivity of the optomechanical detector within the 8−14 μm wavelength band, achieving an enhancement of 81.8%.

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Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

Luo,

Hou,

Meng

et al. 2024

ACS Photonics

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show abstract

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High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film

Cited by 1 publication

References 27 publications

Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

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