High sensitivity FBG humidity sensor coated with graphene and polyimide films

Li, Ziwan; Dong, Bo; Chen, Enqing; Li, Yang; Zhao, Wei; Wang, Yishan; Gao, Chao

doi:10.1016/j.yofte.2021.102635

Cited by 28 publications

(2 citation statements)

References 20 publications

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“…The resistive devices are small, simple and low-cost, but this device type has the disadvantage of low test accuracy because of its poor antijamming capability 14 . Optical sensor devices have high test accuracy, but their micromachining processes do not match well with integrated circuit techniques 15 , 16 . Among the different design principles, the capacitive-type device is favored because this device offers both better accuracy over a wide relative humidity (RH) range and integration convenience 17 .…”

Section: Introductionmentioning

confidence: 99%

A nanoforest-based humidity sensor for respiration monitoring

Chen

Guan²,

Shi

et al. 2022

Microsyst Nanoeng

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Traditional humidity sensors for respiration monitoring applications have faced technical challenges, including low sensitivity, long recovery times, high parasitic capacitance and uncalibrated temperature drift. To overcome these problems, we present a triple-layer humidity sensor that comprises a nanoforest-based sensing capacitor, a thermistor, a microheater and a reference capacitor. When compared with traditional polyimide-based humidity sensors, this novel device has a sensitivity that is improved significantly by 8 times within a relative humidity range of 40–90%. Additionally, the integration of the microheater into the sensor can help to reduce its recovery time to 5 s. The use of the reference capacitor helps to eliminate parasitic capacitance, and the thermistor helps the sensor obtain a higher accuracy. These unique design aspects cause the sensor to have an excellent humidity sensing performance in respiration monitoring applications. Furthermore, through the adoption of machine learning algorithms, the sensor can distinguish different respiration states with an accuracy of 94%. Therefore, this humidity sensor design is expected to be used widely in both consumer electronics and intelligent medical instrument applications.

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Section: Introductionmentioning

confidence: 99%

A nanoforest-based humidity sensor for respiration monitoring

Chen

Guan²,

Shi

et al. 2022

Microsyst Nanoeng

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show abstract

“…The maximum sensitivity of the sensor is −0.1679 nm/%RH. In 2021, Ziwan Li et al [15] proposed a FBG humidity sensor based on polyimide and graphene films. In the humidity range of 30%~70%RH, its sensitivity is calculated to be 19.8 pm/%RH.…”

Section: Introductionmentioning

confidence: 99%