2022
DOI: 10.20944/preprints202208.0034.v1
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High Sensitivity Sers Substrate of A Few Nanometers Single-Layer Silver Thickness Fabricated by DC Magnetron Sputtering Technology

Abstract: Surface-enhanced Raman spectroscopy (SERS) is commonly used for super-selective analysis through nanostructured silver layers in the environment, food quality, biomedicine, and materials science. To fabricate a high-sensitivity but more accessible device of SERS, dc magnetron sputtering technology was used to realize high sensitivity, low cost, stable deposition rate, and rapid mass production. This study investigated various thicknesses of a silver film ranging from 3.0 to 12.1 nm by field-emission-scanning-e… Show more

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Cited by 5 publications
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“…Various techniques such as lithography (Liu et al 2017), chemical vapor deposition (Ayhan 2021), magnetron sputtering (Wu et al 2022), electrochemical deposition (Xia et al 2016), and nanoparticle adsorption on substrate followed by synthesis of plasmonic material by wet chemical methods (Fortuni et al 2017) are employed to fabricate SERS substrate. The SERS substrate fabricated with PVD and CVD techniques possesses high sensitivity, reproducibility, and scalability.…”
Section: Sers Activity Mainly Depends On Electromagnetic (Em) and Che...mentioning
confidence: 99%
“…Various techniques such as lithography (Liu et al 2017), chemical vapor deposition (Ayhan 2021), magnetron sputtering (Wu et al 2022), electrochemical deposition (Xia et al 2016), and nanoparticle adsorption on substrate followed by synthesis of plasmonic material by wet chemical methods (Fortuni et al 2017) are employed to fabricate SERS substrate. The SERS substrate fabricated with PVD and CVD techniques possesses high sensitivity, reproducibility, and scalability.…”
Section: Sers Activity Mainly Depends On Electromagnetic (Em) and Che...mentioning
confidence: 99%