2023
DOI: 10.3390/s23104952
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High-Temperature Fiber-Optic Fabry–Perot Vibration Sensor Based on Single-Crystal Sapphire

Abstract: In this paper, a fiber-optic Fabry–Perot (F–P) vibration sensor that can work at 800 °C is proposed. The F–P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range o… Show more

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Cited by 6 publications
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“…In our previous studies, we proposed a vibration sensor based on silicon material, with a working temperature of 400 • C [28]. By optimizing the material composition and preparation process of the sensor sensitive unit, the working temperature of the sensor was improved to 800 • C [29].…”
Section: Introductionmentioning
confidence: 99%
“…In our previous studies, we proposed a vibration sensor based on silicon material, with a working temperature of 400 • C [28]. By optimizing the material composition and preparation process of the sensor sensitive unit, the working temperature of the sensor was improved to 800 • C [29].…”
Section: Introductionmentioning
confidence: 99%