2009
DOI: 10.1016/j.snb.2009.01.024
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High temperature humidity sensors based on sputtered Y-doped BaZrO3 thin films

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Cited by 32 publications
(14 citation statements)
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“…The NiO films were then annealed at 900 • C in synthetic air (80% N 2 , 20% O 2 ) for 5 h. The IDE structure is fabricated by liftoff photolithography and consists of a 20 nm thick titanium adhesion layer and a 230 nm thick platinum layer on top. The IDE is 250 m wide and the bond pad dimensions were one mm by one mm [7]. The IDE structure was used to measure the change in film resistance.…”
Section: Methodsmentioning
confidence: 99%
“…The NiO films were then annealed at 900 • C in synthetic air (80% N 2 , 20% O 2 ) for 5 h. The IDE structure is fabricated by liftoff photolithography and consists of a 20 nm thick titanium adhesion layer and a 230 nm thick platinum layer on top. The IDE is 250 m wide and the bond pad dimensions were one mm by one mm [7]. The IDE structure was used to measure the change in film resistance.…”
Section: Methodsmentioning
confidence: 99%
“…Such materials often exhibit significant oxygen-ion conductivity at elevated temperatures [1,2]. When such a material is exposed to a water vapor containing atmosphere at elevated temperatures, it can absorb water into the structure and consequently may become a proton conductor.…”
Section: Models and Computational Detailsmentioning
confidence: 99%
“…The group of compounds, which has been intensively studied and presented in the literature, are perovskites like BaZrO 3 or Y-doped BaCeO 3 . These compounds are characterised by maximum proton conductivity of about 10 −2 S/cm [1][2][3][4]. The BaCeO 3 exhibits a relatively high protonic conductivity but is unstable in CO 2 atmosphere.…”
Section: Introductionmentioning
confidence: 99%