High-Throughput Temporal ALD Al2O3 Passivation as Rear Surface Passivation for Industrial Local Al BSF Si Solar Cells

Zagwijn, P.M.; Huussen, F.; Pierreux, Dieter; Mertens, R.; Poortmans, Jef; John, Joachim; Rothschild, A.; Vermang, Bart

doi:10.4229/26theupvsec2011-2bv.3.49

26th European Photovoltaic Solar Energy Conference and Exhibition; 1739-1741 2011

DOI: 10.4229/26theupvsec2011-2bv.3.49

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High-Throughput Temporal ALD Al2O3 Passivation as Rear Surface Passivation for Industrial Local Al BSF Si Solar Cells

P.M. Zagwijn¹,

F. Huussen²,

Dieter Pierreux³

et al.

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High-Throughput Temporal ALD Al2O3 Passivation as Rear Surface Passivation for Industrial Local Al BSF Si Solar Cells

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