Highly‐Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates

Park, Kwi Il; Son, Jung Hwan; Hwang, Geon Tae; Jeong, Chang Kyu; Ryu, Jungho; Koo, Min; Choi, Insung; Lee, Seung Hyun; Byun, Myunghwan; Wang, Zhong Lin; Lee, Keonjae

doi:10.1002/adma.201305659

Cited by 748 publications

(558 citation statements)

References 33 publications

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“…52 On the contrary, our AD-formed KNN f-PEH device is strikingly superior to these representative previous reports of flexible lead-free generators. The high performance in this work is even comparable to that of prior high-performance lead-based f-PEHs made by sol-gel PZT films, 11,65 AD-formed PZT thick film, 55 and solid-grown Pb(Mg 1/3 Nb 2/3 )O 3 -PZT (PMN-PZT) thick film 66 with IDEs under similar deformations. This remarkable output performance of our lead-free f-PEH stems from the high-quality and dense AD-formed L-KNN piezoceramic thin film.…”

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confidence: 70%

Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film

et al. 2017

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Flexible piezoelectric energy harvesters have been regarded as an overarching candidate for achieving self-powered electronic systems for environmental sensors and biomedical devices using the self-sufficient electrical energy. In this research, we realize a flexible high-output and lead-free piezoelectric energy harvester by using the aerosol deposition method and the laser lift-off process. We also investigated the comprehensive biocompatibility of the lead-free piezoceramic device using ex-vivo ionic elusion and in vivo bioimplantation, as well as in vitro cell proliferation and histologic inspection. The fabricated LiNbO3-doped (K,Na)NbO3 (KNN) thin film-based flexible energy harvester exhibited an outstanding piezoresponse, and average output performance of an open-circuit voltage of ∼130 V and a short-circuit current of ∼1.3 μA under normal bending and release deformation, which is the best record among previously reported flexible lead-free piezoelectric energy harvesters. Although both the KNN and Pb(Zr,Ti)O3 (PZT) devices showed short-term biocompatibility in cellular and histological studies, excessive Pb toxic ions were eluted from the PZT in human serum and tap water. Moreover, the KNN-based flexible energy harvester was implanted into a porcine chest and generated up to ∼5 V and 700 nA from the heartbeat motion, comparable to the output of previously reported lead-based flexible energy harvesters. This work can compellingly serve to advance the development of piezoelectric energy harvesting for actual and practical biocompatible self-powered biomedical applications beyond restrictions of lead-based materials in long-term physiological and clinical aspects.

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confidence: 70%

Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film

et al. 2017

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“…An inorganic‐based laser lift‐off (ILLO) process was used in this method 40. The size limitation of PZT thin film was eliminated by the ILLO process, resulting in an output increase of the flexible PENG ( Figure 6 A).…”

Section: Materials and Device Designmentioning

confidence: 99%

Recent Progress on Piezoelectric and Triboelectric Energy Harvesters in Biomedical Systems

et al. 2017

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Implantable medical devices (IMDs) have become indispensable medical tools for improving the quality of life and prolonging the patient's lifespan. The minimization and extension of lifetime are main challenges for the development of IMDs. Current innovative research on this topic is focused on internal charging using the energy generated by the physiological environment or natural body activity. To harvest biomechanical energy efficiently, piezoelectric and triboelectric energy harvesters with sophisticated structural and material design have been developed. Energy from body movement, muscle contraction/relaxation, cardiac/lung motions, and blood circulation is captured and used for powering medical devices. Other recent progress in this field includes using PENGs and TENGs for our cognition of the biological processes by biological pressure/strain sensing, or direct intervention of them for some special self‐powered treatments. Future opportunities lie in the fabrication of intelligent, flexible, stretchable, and/or fully biodegradable self‐powered medical systems for monitoring biological signals and treatment of various diseases in vitro and in vivo.

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“…Park et al demonstrated large-area PZT thin films on flexible substrates via a laser lift-off (LLO) process and fabricated a thin-film nanogenerator (NG) to realize highly efficient, lightweight, and flexible piezoelectric energy harvesting devices. (39) …”

Section: Transferring Process Of Piezoelectric Thick Filmmentioning

confidence: 99%

“…(32) (c) Final flexible PZT thin-film NG attached to a glass tube and bent by human fingers (inset) (d) (i) Open-circuit voltage and cross-sectional current density measured from PZT thin-film NG and (ii) Measured output voltage and cross-sectional current density under different load resistances from 2 kΩ to 1 GΩ. (39) in vivo biomechanical energy. (54) This single-crystal harvester generated a short-circuit current of 1.75…”

Section: Energy Harvesters With Flexible Polymer Substratementioning

confidence: 99%

Piezoelectric Thick Film Based on Bonding technologies for Energy Harvester

2017

Sensors and Materials

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With the development of low-power-consumption electronic devices and systems, the development of power supplies will be a major challenge. High-performance piezoelectric energy harvesters (PEHs) are an alternative that convert mechanical deformation into electric charge. For PEHs, it is highly desirable to utilize materials with a high piezoelectric charge coefficient. Piezoelectric thick films based on bonding and thinning technologies meet this requirement due to their high-temperature sintering process. In this paper we review the development of piezoelectric thick film fabrication processes, including the direct bonding process and the transferring process. Additionally, PEHs in substrates for different applications are described. Moreover, we summarize and compare the output performance of thick-film-based PEHs from all recently published papers in terms of normalized power density and resonant frequency.

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Highly‐Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates

Cited by 748 publications

References 33 publications

Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film

Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film

Recent Progress on Piezoelectric and Triboelectric Energy Harvesters in Biomedical Systems

Piezoelectric Thick Film Based on Bonding technologies for Energy Harvester

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