Highly reliable fitting for gas delivery systems

Abstract

After confirming the basic characteristics of two types of metal gasket fittings, which are used in construction of ultrapure gas delivery systems for semiconductor manufacturing, it is noticed that the pipe usually twists at the time the fitting is tightened. This may be the possible cause of an external leak, therefore a twist leak test was undertaken to confirm the reliability of the seal during assembly. As a result, it was found that one type of fitting leaked and another type of fitting did not leak. This later type did not leak (leak rate is less than 2.98×10−16 Pa m3/s) even after 70° of twisting.