2024
DOI: 10.35848/1347-4065/ad555f
|View full text |Cite
|
Sign up to set email alerts
|

Highly sensitive electron-beam-induced X-ray detection from liquid using SiNx membrane ultra-thinned by gas cluster ion beams

Masaya Takeuchi,
Satoru Suzuki,
Masaki Nakamura
et al.

Abstract: We would like to improve detection sensitivity by making photoelectron transmission window (SiNx membrane) of liquid cell ultra-thin for liquid measurement using XPS or X-ray PEEM at UHV. In this study, thinning of the membrane using gas cluster ion beams (GCIB) was demonstrated and the burst pressure was compared with those thinned with atomic 400 eV Ar+ ions. It was shown that SiNx membranes thinned by GCIB was 2.5 times higher burst pressure than the Ar+ ions. In addition, improvement of sensitivity of char… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 45 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?