Enhanced fluorescence using an optical interference mirror (OIM) slide consisting of a metal film and a transparent dielectric thin film is used to improve the sensitivity of a DNA microarray. Twenty-one bases of a probe DNA are immobilized on the OIM slide fabricated with Ag and Al 2 O 3 , and 21 bases of target DNA, whose sequence is complementary to that of the probe DNA, are detected. After evaluating the hybridization specificity between the probe DNA and the target DNA, the sensitivity improvement is estimated. As a result, a 50-fold improvement can be achieved compared with a bare glass slide.