Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites

Marauska, Stephan; Jahns, Robert; Kirchhof, Christine; Claus, M.; Quandt, Eckhard; Knöchel, R.; Wagner, Bernhard

doi:10.1016/j.sna.2012.10.015

Cited by 89 publications

(55 citation statements)

References 23 publications

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“…They can be used in different technological applications such as magnetic sensors, microelectromechanical systems (MEMS), and energy harvesters [1][2][3]. Composite multiferroic materials, which consist of ferroelectric and ferromagnetic phases, show a much larger magnetoelectric effect compared to single-phase materials.…”

Section: Introductionmentioning

confidence: 99%

Magnetoelectric coupling on multiferroic cobalt ferrite–barium titanate ceramic composites with different connectivity schemes

et al. 2015

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Section: Introductionmentioning

confidence: 99%

Magnetoelectric coupling on multiferroic cobalt ferrite–barium titanate ceramic composites with different connectivity schemes

et al. 2015

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“…4,10,15,[20][21][22] Sensitivities of a few pico-Tesla to hundreds of femto-Tesla for 1-30 Hz magnetic fields are required for such application. A viable approach for achieving such sensitivities is a bilayer ME sensor operating under frequency modulation at bending resonance.…”

Section: Resultsmentioning

confidence: 99%

Magneto-electric interactions at bending resonance in an asymmetric multiferroic composite: Theory and experiment on the influence of electrode position

Sreenivasulu

Петров

et al. 2015

Journal of Applied Physics

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In magnetostrictive-piezoelectric bilayers the strength of mechanical strain mediated magneto-electric (ME) interactions shows a resonance enhancement at bending modes. Such composites when operating under frequency modulation at bending resonance have very high ME sensitivity and are of importance for ultrasensitive magnetometers. This report provides an avenue for further enhancement in the ME sensitivity by strategic positioning of the electrodes in the bilayer. We discuss the theory and measurements on the dependence of ME coupling on the position of electrodes in a lead zirconate titanate-permendur bilayer. Samples of effective length L with full electrodes and partial electrodes of length l ¼ L/3 are studied. A five-fold increase in ME voltage coefficient (MEVC) at bending resonance and a 75% increase in low-frequency MEVC are measured as the partial electrode position is moved from the free-end to clamped-end of the bilayer. When the partial electrode is close to the clamped end, the low-frequency and resonance MEVC are 22% and 45% higher, respectively, than for fully electroded bilayer. According to the model discussed here these observations could be attributed to non-uniform stress along the sample length under flexural deformation. Such deformations are stronger at the free-end than at the clamped-end, thereby reducing the stress produced by applied magnetic fields and a reduction in MEVC. Estimates of MEVC are in good agreement with the data. V C 2015 AIP Publishing LLC. [http://dx.

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“…Mo Li et al [6] reported a Lorentz force magnetometer for electronic compass with a resolution 210 nT/√Hz with a DC supply of 2 V at 21.29 KHz resonance frequency. Magnetoelectric composites have been used by Marauska et al [7] as cantilever deposit to give a minimum resolution of 30 pT and sensitivity of 3.8 V/mT. Using a bias current of 7.245 mA, Kumar et al [8] reported sensitivity of a Lorentz force magnetometer device to be 2.107 mV/nT, considering a low noise floor of 2.8 pT/√Hz.…”

Section: Introductionmentioning

confidence: 99%

27 pT Silicon Nitride MEMS Magnetometer for Brain Imaging

Sinha

Tabib-Azar

2016

IEEE Sensors J.

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Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites

Cited by 89 publications

References 23 publications

Magnetoelectric coupling on multiferroic cobalt ferrite–barium titanate ceramic composites with different connectivity schemes

Magnetoelectric coupling on multiferroic cobalt ferrite–barium titanate ceramic composites with different connectivity schemes

Magneto-electric interactions at bending resonance in an asymmetric multiferroic composite: Theory and experiment on the influence of electrode position

27 pT Silicon Nitride MEMS Magnetometer for Brain Imaging

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