“…Current interests in hydrogenated amorphous silicon thin films and its alloys as promising candidates for the realization of advanced sensing system such as gas sensors [1,2], pixel detector for high energy particles [3,4], optical imaging [5], active matrix displays [6,7] and solar cells [8][9][10] is clearly seen from these publications. Hydrogenated amorphous silicon thin films have high optical absorption, low temperature deposition (<300°C) is possible, high uniformity over large area, few constraints on substrate size, material, or topology.…”