HV Gate Oxide Over-Oxidation Process Optimization for SONOS 1.5T Flash Cell

Zhang, Jian; Xiong, Wei; Chen, Hualun

doi:10.1109/cstic49141.2020.9282425

2020 China Semiconductor Technology International Conference (CSTIC) 2020

DOI: 10.1109/cstic49141.2020.9282425

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HV Gate Oxide Over-Oxidation Process Optimization for SONOS 1.5T Flash Cell

Jian Zhang

Wei Xiong

Hualun Chen

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HV Gate Oxide Over-Oxidation Process Optimization for SONOS 1.5T Flash Cell

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