Abstract:In this paper, the design of a RF MEMS oscillator on a silicon-ceramic composite substrate using a high-Q Lamb-wave resonator as frequency-selective device is described. The MEMS resonator is designed on a 1.8 μm thick piezoelectric AlN layer, deposited on silicon using thin-film processes. The finite-element simulation results of the resonator structure are presented, and the derivation of the electrical equivalent-circuit is described. The active part of the MEMS oscillator, which was laid out in a Pierce to… Show more
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