2005
DOI: 10.2172/861904
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Hybrid Micro-Electro-Mechanical Systems for Highly Reliable and Selective Characterization of Tank Waste

Abstract: Research Objective:The main objective of this research program is to develop robust and reliable micro-electro-mechanical sensing systems, based on microcantilevers (MCs), that can operate in liquid environments with high levels of sensitivity and selectivity. The chemical responses of MCs result from analyte-induced differential stress at the cantilever surfaces. We aim to employ various surface nanostructuring strategies that enhance these stresses and hence the degree of static bending of the cantilevers. R… Show more

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