I.H.P. SAW technology and its application to microacoustic components (Invited)

Takai, Tsutomu; Iwamoto, Hideki; Takamine, Yuichi; Fuyutsume, Toshiyuki; Nakao, Takeshi; Hiramoto, Masahiro; Toi, Takanori; Koshino, Masayoshi

doi:10.1109/ultsym.2017.8091876

Cited by 125 publications

(47 citation statements)

References 19 publications

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“…Thin monocrystalline lithium tantalate (LT) layers with micron thickness on a thick carrier substrate are used in Murata's IHP SAW technology [2]. The device operation is based on waveguiding of quasi‐shear waves in the thin LT layer on a ‘fast’ substrate.…”

Section: Thin Lithium Niobate (Ln) Plate Devicesmentioning

confidence: 99%

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5 GHz laterally‐excited bulk‐wave resonators (XBARs) based on thin platelets of lithium niobate

Plessky¹,

Yandrapalli

Turner³

et al. 2019

Electron. lett.

142

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In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO 3 , narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented parallel to the crystalline Y-axis and parallel to the plane of the platelet. The resonance frequency of ∼4800 MHz is determined mainly by the platelet thickness and only weakly depends on the electrode width and the pitch. Simulations show quality-factors (Q) at resonance and anti-resonance higher than 1000. Measurements of the first fabricated devices show a resonance Q-factor ∼300, strong piezoelectric coupling ∼25%, (indicated by the large Resonance-antiResonance frequency spacing, ∼11%) and an impedance at resonance of a few ohms. The static capacitance of the devices, corresponds to the imaginary part of the impedance ∼100 Ω. This device opens the possibility for the development of low-loss, wide band, RF filters in the 3-6 GHz range for 4th and 5th generation (4G/5G) mobile phones. XBARs can be produced using standard optical photolithography and MEMS processes. The 3rd, 5th, 7th, and 9th harmonics were observed, up to 38 GHz, and are also promising for high frequency filter design.

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Section: Thin Lithium Niobate (Ln) Plate Devicesmentioning

confidence: 99%

“…This Letter shows a potential path to such solutions. It is inspired by Kadota's results [1] on Lamb modes in thin LiNbO 3 layers, by Murata's Incredibly High Performance (IHP) wafer technology [2] for SAW devices and by recent developments in MEMS [3].…”

mentioning

confidence: 99%

5 GHz laterally‐excited bulk‐wave resonators (XBARs) based on thin platelets of lithium niobate

Plessky¹,

Yandrapalli

Turner³

et al. 2019

Electron. lett.

142

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“…The detailed process is presented that the antiperiodic boundary conditions (X L = −X R ) is imposed on the left-and the right-hand edge of the block (shown in Figure 2a) for describing the repeating structure. Therefore, Equation (15) with reduction of the dimensionality can be reduced the dimensionality again by eliminating the DOFs X R . Therefore, the linear system equations for the periodic structure only include the X L and v, as follows…”

Section: Mor Based On Anti-periodic Boundary Conditionmentioning

confidence: 99%

“…This promotes the emergence of a large number of new-type SAW devices, such as temperature-compensated SAW (TC-SAW) devices [ 11 , 12 , 13 ], incredible high-performance SAW (I.H.P. SAW) devices [ 14 , 15 ], and laterally-excited bulk-wave resonators (XBARs) [ 16 , 17 ]. Performances of those RF SAW devices are dominantly limited by their resonators.…”

Section: Introductionmentioning

confidence: 99%

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Zhang

Chen

et al. 2021

Micromachines

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Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

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“…It promotes the emergence of a large number of new-type SAW devices, such as temperature compensated SAW (TC-SAW) devices [ 3 , 4 , 5 ], incredible high-performance SAW (I.H.P. SAW) devices [ 6 , 7 , 8 , 9 ], and laterally-excited bulk-wave resonators (XBARs) [ 10 , 11 ]. However, for such SAW devices with complicated structures, a universal method used for the accurate and fast simulation of the SAW devices calls for urgent demand.…”

Section: Introductionmentioning

confidence: 99%

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Chen

Zhang

et al. 2020

Micromachines

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In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices is proposed to achieve accurate and fast simulation. The partial differential equation (PDE) models of the physical system in question and graphics processing unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate acoustic-electric characteristics of a SAW filter. The practical solid model of the radio frequency (RF) filter package is constructed in High Frequency Structure Simulator (HFSS) software and the parasitic electromagnetics of the entire package is considered in the design process. The PDE-based models of the two-dimensional finite element method (2D-FEM) are derived in detail and solved by the PDE module embedded in COMSOL Multiphysics. Due to the advantages of PDE-based 2D-FEM, it is universal, efficient and not restricted to handling arbitrary materials and crystal cuts, electrode shapes, and multi-layered substrate. Combining COMSOL Multiphysics with a user-friendly interface, a flexible way of modeling and mesh generation, it can greatly reduce the complicated process of modeling and physical properties definition. Based on a hybrid full-wave analysis, we present an example application of this approach on a TC-SAW ladder filter with 5° YX-cut LiNbO3 substrate. Numerical results and measurements were calculated for comparison, and the accuracy and efficiency of the proposed method were verified.

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I.H.P. SAW technology and its application to microacoustic components (Invited)

Cited by 125 publications

References 19 publications

5 GHz laterally‐excited bulk‐wave resonators (XBARs) based on thin platelets of lithium niobate

5 GHz laterally‐excited bulk‐wave resonators (XBARs) based on thin platelets of lithium niobate

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

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