<i>Plasma Diagnostics with Microwaves</i>

Heald, Mark A.; Wharton, C. B.; Furth, H. P.

doi:10.1063/1.3047729

Cited by 481 publications

(338 citation statements)

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“…There are several diagnostic techniques employed for the determination of electron density and temperature which includes plasma spectroscopy, 4 Langmuir probe, 5 microwave and laser interferometries, and Thomson scattering. [6][7][8] In this paper we report the studies on radio frequency ͑rf͒ plasma using Langmuir probe and optical-emission spectroscopy ͑OES͒. The plasma parameters such as ion density and electron temperature were determined and their dependence on properties of thin film deposited under similar plasma conditions were studied.…”

Section: Introductionmentioning

confidence: 99%

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Nisha

Saji

Ajimsha

et al. 2006

Journal of Applied Physics

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The radio frequency plasma generated during the sputtering of Indium Tin Oxide target using Argon was analyzed by Langmuir probe and optical-emission spectroscopy. The basic plasma parameters such as electron temperature and ion density were evaluated. These studies were carried out by varying the RF power from 20 to 50 W. A linear increase in ion density and an exponential decrease in electron temperature with rf power were observed. The measured plasma parameters were then correlated with the properties of ITO thin films deposited under similar plasma conditions.

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Section: Introductionmentioning

confidence: 99%

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Nisha

Saji

Ajimsha

et al. 2006

Journal of Applied Physics

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“…like ideal interferometer signals, to the phase relation between waves of constant amplitude. In contrast to this are changes in the amplitude of the collected scene beam signal at the interferometer detector due to, for example, changes in the source output or modified coupling due to the plasma [3]. The interferometer is equipped with a rotary phase shifter which varies the optical path length, but not the physical path length, for the scene beam upstream of the transmitter optics.…”

Section: The Instrumentmentioning

confidence: 99%

“…Depending in part on the alignment, it was observed that reflections set up between the transmitter and receiver resulted in significant effects on the phase shift measurements [3]. Probable candidate causes for this circumstance are thought to be (1) the polychromatic design of the interferometer, in which all three frequencies travel in a common wave guide, (2) the optical configuration, which is essentially symmetric with respect to transmitter and receiver, and (3) the flexibility in alignment due to the use of cables, rather than waveguides, in connecting the transmitter and receiver.…”

Section: Introductionmentioning

confidence: 99%

“…In the present instrument, the three frequency components, while spatially overlapped, are essentially independent, and the interferometer may be used for mono-or bi-chromatic measurements without operational modification. Also, although not addressed here, the interferometer has reflectometry capability, which, along with the polychromaticity, is suited to operation near critical density, as in, for example, investigation of collision frequencies in transient plasmas [3].…”

Section: Introductionmentioning

confidence: 99%

“…[2], and discussion of early microwave interferometer experiments by Heald and Wharton [3]. The microwave frequencies provide good sensitivity, and incorporation of phase shifters and additional detectors provides the benefits of quadrature capability [4].…”

Section: Introductionmentioning

confidence: 99%

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Instrument reflections and scene amplitude modulation in a polychromatic microwave quadrature interferometer

Dobson

Jones

Chavers

2004

Review of Scientific Instruments

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A polychromatic microwave quadrature interferometer has been characterized using several laboratory plasmas. Reflections between the transmitter and the receiver have been observed, and the effects of including reflection terms in the data reduction equation have been examined. An error analysis which includes the reflections, modulation of the scene beam amplitude by the plasma, and simultaneous measurements at two frequencies has been applied to the empirical database, and the results are summarized. For reflection amplitudes around 1096, the reflection terms were found to reduce the calculated error bars for electron density measurements by about a factor of 2. The impact of amplitude modulation is also quantified. In the complete analysis, the mean error bar for highdensity measurements is 7.596, and the mean phase shift error for low-density measurements is 1.2".. PACS no.'s/OCIS codes, etc analogue I. Introduction.

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Millimeter‐Wave Monitoring of Nuclear Waste Glass Melts ‐ An Overview

Woskov

Machuzak

Thomas

et al. 2006

Ceramic Transactions Series

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Molten glass characteristics of temperature, resistivity, and viscosity can be monitored reliably in the high temperature and chemically corrosive environment of nuclear waste glass melters using millimeter-wave sensor technology. Millimeter-waves are ideally suited for such measurements because they are long enough to penetrate optically unclear atmospheres, but short enough for spatially resolved measurements. Also efficient waveguide and optic components can be fabricated from refractory materials such as ceramics. Extensive testing has been carried out at a frequency of 137 GHz to temperatures up to 1500 °C. Performance of refractory waveguides at high temperature has been shown to be satisfactory. A novel new method for viscosity monitoring has also been tested with simulated nuclear waste glasses. It has been shown that a viscosity range of over 20 to 2000 Poise can be monitored with one instrument. Results of these laboratory tests and the potential of millimeter-wave sensors for on-line glass process monitoring are presented.

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Plasma Diagnostics with Microwaves

Cited by 481 publications

References 0 publications

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Instrument reflections and scene amplitude modulation in a polychromatic microwave quadrature interferometer

Millimeter‐Wave Monitoring of Nuclear Waste Glass Melts ‐ An Overview

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