Infrared Detectors 2010
DOI: 10.1201/b10319-20
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III-V Detectors

Abstract: The quantum-well infrared photodetector (QWIP) is a relatively new type of semiconductor detector which has a clearly defined spectral response. This study shows that the infrared spectral response of a QWIP can be fine tuned. We have fabricated AlGaAs-GaAs QWIPs, and used proton implantation and rapid thermal annealing to tune the infrared spectral response of these QWIPs by up to 1.4 pm. Multiple proton implants at energies between 200 and 400 keV were used to create homogeneous quantum-well intermixing thro… Show more

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References 187 publications
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